JPS63130769A - ターゲット材 - Google Patents
ターゲット材Info
- Publication number
- JPS63130769A JPS63130769A JP27769886A JP27769886A JPS63130769A JP S63130769 A JPS63130769 A JP S63130769A JP 27769886 A JP27769886 A JP 27769886A JP 27769886 A JP27769886 A JP 27769886A JP S63130769 A JPS63130769 A JP S63130769A
- Authority
- JP
- Japan
- Prior art keywords
- vapor deposition
- target material
- thin film
- alloy
- kinds
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000956 alloy Substances 0.000 title claims abstract description 45
- 229910045601 alloy Inorganic materials 0.000 title claims abstract description 44
- 238000007740 vapor deposition Methods 0.000 title claims abstract description 42
- 239000013077 target material Substances 0.000 title claims abstract description 30
- 229910052771 Terbium Inorganic materials 0.000 claims abstract description 10
- 229910052688 Gadolinium Inorganic materials 0.000 claims abstract description 9
- 229910052779 Neodymium Inorganic materials 0.000 claims abstract description 9
- 229910052742 iron Inorganic materials 0.000 claims abstract description 9
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 9
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 8
- 229910052689 Holmium Inorganic materials 0.000 claims abstract description 7
- 229910052727 yttrium Inorganic materials 0.000 claims 1
- 239000010409 thin film Substances 0.000 abstract description 21
- 239000010408 film Substances 0.000 abstract description 20
- 238000004544 sputter deposition Methods 0.000 abstract description 18
- 230000015572 biosynthetic process Effects 0.000 abstract description 10
- 230000000694 effects Effects 0.000 abstract description 9
- 229910052692 Dysprosium Inorganic materials 0.000 abstract description 7
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 230000003647 oxidation Effects 0.000 abstract description 4
- 238000007254 oxidation reaction Methods 0.000 abstract description 4
- 229910052761 rare earth metal Inorganic materials 0.000 abstract description 2
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 abstract 3
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000001771 vacuum deposition Methods 0.000 abstract 1
- ODINCKMPIJJUCX-UHFFFAOYSA-N Calcium oxide Chemical compound [Ca]=O ODINCKMPIJJUCX-UHFFFAOYSA-N 0.000 description 15
- 235000012255 calcium oxide Nutrition 0.000 description 14
- 239000000292 calcium oxide Substances 0.000 description 14
- 229910052751 metal Inorganic materials 0.000 description 13
- 239000002184 metal Substances 0.000 description 13
- 239000000203 mixture Substances 0.000 description 10
- 239000000463 material Substances 0.000 description 9
- 230000008018 melting Effects 0.000 description 7
- 238000002844 melting Methods 0.000 description 7
- 238000005266 casting Methods 0.000 description 5
- 230000000052 comparative effect Effects 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000011819 refractory material Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 239000012535 impurity Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000007738 vacuum evaporation Methods 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 238000005275 alloying Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- -1 Day Inorganic materials 0.000 description 1
- 229910017061 Fe Co Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910000514 dolomite Inorganic materials 0.000 description 1
- 239000010459 dolomite Substances 0.000 description 1
- 238000005247 gettering Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 229910000765 intermetallic Inorganic materials 0.000 description 1
- 229910052747 lanthanoid Inorganic materials 0.000 description 1
- 150000002602 lanthanoids Chemical class 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27769886A JPS63130769A (ja) | 1986-11-20 | 1986-11-20 | ターゲット材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27769886A JPS63130769A (ja) | 1986-11-20 | 1986-11-20 | ターゲット材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63130769A true JPS63130769A (ja) | 1988-06-02 |
| JPH0518899B2 JPH0518899B2 (enrdf_load_stackoverflow) | 1993-03-15 |
Family
ID=17587060
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27769886A Granted JPS63130769A (ja) | 1986-11-20 | 1986-11-20 | ターゲット材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63130769A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07171660A (ja) * | 1991-08-22 | 1995-07-11 | W C Heraeus Gmbh | 高温亀裂感受性材料から成る成形体の製造方法およびこの方法を実施するための鋳型 |
| CN103946415A (zh) * | 2012-01-25 | 2014-07-23 | 吉坤日矿日石金属株式会社 | 强磁性材料溅射靶 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002069625A (ja) * | 2000-09-01 | 2002-03-08 | Mitsui Mining & Smelting Co Ltd | スパッタリングターゲットの製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6191336A (ja) * | 1984-10-09 | 1986-05-09 | Mitsubishi Metal Corp | 合金タ−ゲツト材の製造方法 |
-
1986
- 1986-11-20 JP JP27769886A patent/JPS63130769A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6191336A (ja) * | 1984-10-09 | 1986-05-09 | Mitsubishi Metal Corp | 合金タ−ゲツト材の製造方法 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07171660A (ja) * | 1991-08-22 | 1995-07-11 | W C Heraeus Gmbh | 高温亀裂感受性材料から成る成形体の製造方法およびこの方法を実施するための鋳型 |
| CN103946415A (zh) * | 2012-01-25 | 2014-07-23 | 吉坤日矿日石金属株式会社 | 强磁性材料溅射靶 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518899B2 (enrdf_load_stackoverflow) | 1993-03-15 |