JPS63128661U - - Google Patents

Info

Publication number
JPS63128661U
JPS63128661U JP2144987U JP2144987U JPS63128661U JP S63128661 U JPS63128661 U JP S63128661U JP 2144987 U JP2144987 U JP 2144987U JP 2144987 U JP2144987 U JP 2144987U JP S63128661 U JPS63128661 U JP S63128661U
Authority
JP
Japan
Prior art keywords
sample
analysis
chamber
pretreatment
predetermined position
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2144987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2144987U priority Critical patent/JPS63128661U/ja
Publication of JPS63128661U publication Critical patent/JPS63128661U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP2144987U 1987-02-16 1987-02-16 Pending JPS63128661U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2144987U JPS63128661U (enrdf_load_stackoverflow) 1987-02-16 1987-02-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2144987U JPS63128661U (enrdf_load_stackoverflow) 1987-02-16 1987-02-16

Publications (1)

Publication Number Publication Date
JPS63128661U true JPS63128661U (enrdf_load_stackoverflow) 1988-08-23

Family

ID=30817906

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2144987U Pending JPS63128661U (enrdf_load_stackoverflow) 1987-02-16 1987-02-16

Country Status (1)

Country Link
JP (1) JPS63128661U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327484A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Ion microanalyzer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5327484A (en) * 1976-08-27 1978-03-14 Hitachi Ltd Ion microanalyzer

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