JPS631242B2 - - Google Patents

Info

Publication number
JPS631242B2
JPS631242B2 JP3798383A JP3798383A JPS631242B2 JP S631242 B2 JPS631242 B2 JP S631242B2 JP 3798383 A JP3798383 A JP 3798383A JP 3798383 A JP3798383 A JP 3798383A JP S631242 B2 JPS631242 B2 JP S631242B2
Authority
JP
Japan
Prior art keywords
silane
container
silicon
temperature
liquefied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3798383A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59164615A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP3798383A priority Critical patent/JPS59164615A/ja
Publication of JPS59164615A publication Critical patent/JPS59164615A/ja
Publication of JPS631242B2 publication Critical patent/JPS631242B2/ja
Granted legal-status Critical Current

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Landscapes

  • Silicon Compounds (AREA)
JP3798383A 1983-03-08 1983-03-08 シラン精製方法 Granted JPS59164615A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3798383A JPS59164615A (ja) 1983-03-08 1983-03-08 シラン精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3798383A JPS59164615A (ja) 1983-03-08 1983-03-08 シラン精製方法

Publications (2)

Publication Number Publication Date
JPS59164615A JPS59164615A (ja) 1984-09-17
JPS631242B2 true JPS631242B2 (enrdf_load_stackoverflow) 1988-01-12

Family

ID=12512797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3798383A Granted JPS59164615A (ja) 1983-03-08 1983-03-08 シラン精製方法

Country Status (1)

Country Link
JP (1) JPS59164615A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS59164615A (ja) 1984-09-17

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