JPS6241164B2 - - Google Patents

Info

Publication number
JPS6241164B2
JPS6241164B2 JP58034836A JP3483683A JPS6241164B2 JP S6241164 B2 JPS6241164 B2 JP S6241164B2 JP 58034836 A JP58034836 A JP 58034836A JP 3483683 A JP3483683 A JP 3483683A JP S6241164 B2 JPS6241164 B2 JP S6241164B2
Authority
JP
Japan
Prior art keywords
silane
container
silicon
fluoride
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58034836A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59162119A (ja
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP3483683A priority Critical patent/JPS59162119A/ja
Publication of JPS59162119A publication Critical patent/JPS59162119A/ja
Publication of JPS6241164B2 publication Critical patent/JPS6241164B2/ja
Granted legal-status Critical Current

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  • Silicon Compounds (AREA)
JP3483683A 1983-03-03 1983-03-03 気相反応用シラン精製方法 Granted JPS59162119A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3483683A JPS59162119A (ja) 1983-03-03 1983-03-03 気相反応用シラン精製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3483683A JPS59162119A (ja) 1983-03-03 1983-03-03 気相反応用シラン精製方法

Publications (2)

Publication Number Publication Date
JPS59162119A JPS59162119A (ja) 1984-09-13
JPS6241164B2 true JPS6241164B2 (enrdf_load_stackoverflow) 1987-09-01

Family

ID=12425277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3483683A Granted JPS59162119A (ja) 1983-03-03 1983-03-03 気相反応用シラン精製方法

Country Status (1)

Country Link
JP (1) JPS59162119A (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59105804A (ja) * 1982-12-11 1984-06-19 Semiconductor Energy Lab Co Ltd 半導体用反応性気体精製方法

Also Published As

Publication number Publication date
JPS59162119A (ja) 1984-09-13

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