JPS6311724Y2 - - Google Patents
Info
- Publication number
- JPS6311724Y2 JPS6311724Y2 JP1168783U JP1168783U JPS6311724Y2 JP S6311724 Y2 JPS6311724 Y2 JP S6311724Y2 JP 1168783 U JP1168783 U JP 1168783U JP 1168783 U JP1168783 U JP 1168783U JP S6311724 Y2 JPS6311724 Y2 JP S6311724Y2
- Authority
- JP
- Japan
- Prior art keywords
- inspection
- pellet
- movable table
- pellets
- block
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 claims description 72
- 238000007689 inspection Methods 0.000 claims description 43
- 239000004065 semiconductor Substances 0.000 claims description 14
- 230000002950 deficient Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 8
- 238000011179 visual inspection Methods 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 4
- 235000012431 wafers Nutrition 0.000 description 6
- 230000006870 function Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 206010047571 Visual impairment Diseases 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1168783U JPS59119034U (ja) | 1983-01-28 | 1983-01-28 | 半導体ペレツト外観検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1168783U JPS59119034U (ja) | 1983-01-28 | 1983-01-28 | 半導体ペレツト外観検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59119034U JPS59119034U (ja) | 1984-08-11 |
| JPS6311724Y2 true JPS6311724Y2 (enrdf_load_html_response) | 1988-04-05 |
Family
ID=30143113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1168783U Granted JPS59119034U (ja) | 1983-01-28 | 1983-01-28 | 半導体ペレツト外観検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59119034U (enrdf_load_html_response) |
-
1983
- 1983-01-28 JP JP1168783U patent/JPS59119034U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59119034U (ja) | 1984-08-11 |
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