JPS6311569B2 - - Google Patents

Info

Publication number
JPS6311569B2
JPS6311569B2 JP55072767A JP7276780A JPS6311569B2 JP S6311569 B2 JPS6311569 B2 JP S6311569B2 JP 55072767 A JP55072767 A JP 55072767A JP 7276780 A JP7276780 A JP 7276780A JP S6311569 B2 JPS6311569 B2 JP S6311569B2
Authority
JP
Japan
Prior art keywords
partition
gondola
performance filter
air
clean
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55072767A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57255A (en
Inventor
Seikichi Saito
Masatoshi Komatani
Tsutomu Hanno
Fumio Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7276780A priority Critical patent/JPS57255A/ja
Publication of JPS57255A publication Critical patent/JPS57255A/ja
Publication of JPS6311569B2 publication Critical patent/JPS6311569B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Central Air Conditioning (AREA)
  • Ventilation (AREA)
JP7276780A 1980-06-02 1980-06-02 Clean room Granted JPS57255A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7276780A JPS57255A (en) 1980-06-02 1980-06-02 Clean room

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7276780A JPS57255A (en) 1980-06-02 1980-06-02 Clean room

Publications (2)

Publication Number Publication Date
JPS57255A JPS57255A (en) 1982-01-05
JPS6311569B2 true JPS6311569B2 (enrdf_load_stackoverflow) 1988-03-15

Family

ID=13498850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7276780A Granted JPS57255A (en) 1980-06-02 1980-06-02 Clean room

Country Status (1)

Country Link
JP (1) JPS57255A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59204227A (ja) * 1983-05-04 1984-11-19 Nec Corp 清浄装置
JPS6033439A (ja) * 1983-08-02 1985-02-20 Nippon Muki Kk 搬送用クリ−ンユニツト並に搬送法
JP2529246B2 (ja) * 1987-03-20 1996-08-28 松下電器産業株式会社 クリ−ン空間のメンテナンス装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5151144A (en) * 1974-10-31 1976-05-06 Nippon Telegraph & Telephone Kuriineakyokyusochi

Also Published As

Publication number Publication date
JPS57255A (en) 1982-01-05

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