JPS6311536Y2 - - Google Patents

Info

Publication number
JPS6311536Y2
JPS6311536Y2 JP7732582U JP7732582U JPS6311536Y2 JP S6311536 Y2 JPS6311536 Y2 JP S6311536Y2 JP 7732582 U JP7732582 U JP 7732582U JP 7732582 U JP7732582 U JP 7732582U JP S6311536 Y2 JPS6311536 Y2 JP S6311536Y2
Authority
JP
Japan
Prior art keywords
room
air
clean
chamber
clean room
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7732582U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58179433U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7732582U priority Critical patent/JPS58179433U/ja
Publication of JPS58179433U publication Critical patent/JPS58179433U/ja
Application granted granted Critical
Publication of JPS6311536Y2 publication Critical patent/JPS6311536Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Devices For Use In Laboratory Experiments (AREA)
JP7732582U 1982-05-25 1982-05-25 クリ−ン室における汚染空気流入防止装置 Granted JPS58179433U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7732582U JPS58179433U (ja) 1982-05-25 1982-05-25 クリ−ン室における汚染空気流入防止装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7732582U JPS58179433U (ja) 1982-05-25 1982-05-25 クリ−ン室における汚染空気流入防止装置

Publications (2)

Publication Number Publication Date
JPS58179433U JPS58179433U (ja) 1983-12-01
JPS6311536Y2 true JPS6311536Y2 (US20100056889A1-20100304-C00004.png) 1988-04-04

Family

ID=30086592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7732582U Granted JPS58179433U (ja) 1982-05-25 1982-05-25 クリ−ン室における汚染空気流入防止装置

Country Status (1)

Country Link
JP (1) JPS58179433U (US20100056889A1-20100304-C00004.png)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010054689A (ja) * 2008-08-27 2010-03-11 Sumitomo Electric Ind Ltd 光ファイバ接続用作業台
JP5690312B2 (ja) * 2012-09-18 2015-03-25 新菱冷熱工業株式会社 局所精密空調装置
JP2014066467A (ja) * 2012-09-27 2014-04-17 Sanpo Denki Kk エアシャワ−装置
JP5867728B2 (ja) * 2012-12-20 2016-02-24 株式会社大気社 調圧室システム

Also Published As

Publication number Publication date
JPS58179433U (ja) 1983-12-01

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