JPS63109512A - 位置決め装置 - Google Patents

位置決め装置

Info

Publication number
JPS63109512A
JPS63109512A JP25656386A JP25656386A JPS63109512A JP S63109512 A JPS63109512 A JP S63109512A JP 25656386 A JP25656386 A JP 25656386A JP 25656386 A JP25656386 A JP 25656386A JP S63109512 A JPS63109512 A JP S63109512A
Authority
JP
Japan
Prior art keywords
guide
moving
friction
positioning device
ultrasonic vibrator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP25656386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH056885B2 (enExample
Inventor
Tomoyoshi Tokunaga
徳永　具祥
Akira Yasutake
昭 安武
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to JP25656386A priority Critical patent/JPS63109512A/ja
Publication of JPS63109512A publication Critical patent/JPS63109512A/ja
Publication of JPH056885B2 publication Critical patent/JPH056885B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Control Of Position Or Direction (AREA)
JP25656386A 1986-10-28 1986-10-28 位置決め装置 Granted JPS63109512A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25656386A JPS63109512A (ja) 1986-10-28 1986-10-28 位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25656386A JPS63109512A (ja) 1986-10-28 1986-10-28 位置決め装置

Publications (2)

Publication Number Publication Date
JPS63109512A true JPS63109512A (ja) 1988-05-14
JPH056885B2 JPH056885B2 (enExample) 1993-01-27

Family

ID=17294377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25656386A Granted JPS63109512A (ja) 1986-10-28 1986-10-28 位置決め装置

Country Status (1)

Country Link
JP (1) JPS63109512A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003076313A1 (fr) * 2002-03-11 2003-09-18 Iai Corporation Dispositif de levitation ultrasonore
JP2006084018A (ja) * 2004-08-20 2006-03-30 National Univ Corp Shizuoka Univ 超音波ガイドユニット
JPWO2004059821A1 (ja) * 2002-12-26 2006-05-11 株式会社アイエイアイ 駆動装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003076313A1 (fr) * 2002-03-11 2003-09-18 Iai Corporation Dispositif de levitation ultrasonore
JPWO2003076313A1 (ja) * 2002-03-11 2005-07-07 株式会社アイエイアイ 超音波浮上装置
JP4494019B2 (ja) * 2002-03-11 2010-06-30 株式会社アイエイアイ 超音波浮上装置
JPWO2004059821A1 (ja) * 2002-12-26 2006-05-11 株式会社アイエイアイ 駆動装置
JP4594093B2 (ja) * 2002-12-26 2010-12-08 株式会社アイエイアイ 駆動装置
JP2006084018A (ja) * 2004-08-20 2006-03-30 National Univ Corp Shizuoka Univ 超音波ガイドユニット

Also Published As

Publication number Publication date
JPH056885B2 (enExample) 1993-01-27

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