JPS63105977A - 薄膜を形成させる方法 - Google Patents

薄膜を形成させる方法

Info

Publication number
JPS63105977A
JPS63105977A JP61249543A JP24954386A JPS63105977A JP S63105977 A JPS63105977 A JP S63105977A JP 61249543 A JP61249543 A JP 61249543A JP 24954386 A JP24954386 A JP 24954386A JP S63105977 A JPS63105977 A JP S63105977A
Authority
JP
Japan
Prior art keywords
thin film
substrate
glass
film
porous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61249543A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0568553B2 (enrdf_load_stackoverflow
Inventor
Takeshi Utsugi
宇都木　毅
Shoichiro Hirakawa
平川　正一郎
Minoru Yoshii
実 吉井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ise Chemicals Corp
Original Assignee
Ise Kagaku Kogyo KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ise Kagaku Kogyo KK filed Critical Ise Kagaku Kogyo KK
Priority to JP61249543A priority Critical patent/JPS63105977A/ja
Publication of JPS63105977A publication Critical patent/JPS63105977A/ja
Publication of JPH0568553B2 publication Critical patent/JPH0568553B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0069—Inorganic membrane manufacture by deposition from the liquid phase, e.g. electrochemical deposition
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0213—Silicon
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2323/00—Details relating to membrane preparation
    • B01D2323/08—Specific temperatures applied
    • B01D2323/081—Heating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Electrochemistry (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Surface Treatment Of Glass (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP61249543A 1986-10-22 1986-10-22 薄膜を形成させる方法 Granted JPS63105977A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61249543A JPS63105977A (ja) 1986-10-22 1986-10-22 薄膜を形成させる方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61249543A JPS63105977A (ja) 1986-10-22 1986-10-22 薄膜を形成させる方法

Publications (2)

Publication Number Publication Date
JPS63105977A true JPS63105977A (ja) 1988-05-11
JPH0568553B2 JPH0568553B2 (enrdf_load_stackoverflow) 1993-09-29

Family

ID=17194552

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61249543A Granted JPS63105977A (ja) 1986-10-22 1986-10-22 薄膜を形成させる方法

Country Status (1)

Country Link
JP (1) JPS63105977A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007517655A (ja) * 2004-01-09 2007-07-05 ビーピー ピー・エル・シー・ 金属パラジウム複合膜又は合金パラジウム複合膜及びその製造方法
JP2008018387A (ja) * 2006-07-14 2008-01-31 Ngk Insulators Ltd 多孔質基材への種結晶塗布方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4078073B2 (ja) 1999-05-28 2008-04-23 シーフィード 流体試料分析装置および方法
US9073053B2 (en) 1999-05-28 2015-07-07 Cepheid Apparatus and method for cell disruption

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007517655A (ja) * 2004-01-09 2007-07-05 ビーピー ピー・エル・シー・ 金属パラジウム複合膜又は合金パラジウム複合膜及びその製造方法
US8052775B2 (en) 2004-01-09 2011-11-08 Bp P.L.C. Process for the preparation of a two-layer metal palladium or palladium alloy composite membrane
JP2008018387A (ja) * 2006-07-14 2008-01-31 Ngk Insulators Ltd 多孔質基材への種結晶塗布方法

Also Published As

Publication number Publication date
JPH0568553B2 (enrdf_load_stackoverflow) 1993-09-29

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