JPS6299476A - プラズマｃｖｄ装置の放電電極 - Google Patents

プラズマｃｖｄ装置の放電電極

Info

Publication number
JPS6299476A
JPS6299476A JP23942685A JP23942685A JPS6299476A JP S6299476 A JPS6299476 A JP S6299476A JP 23942685 A JP23942685 A JP 23942685A JP 23942685 A JP23942685 A JP 23942685A JP S6299476 A JPS6299476 A JP S6299476A
Authority
JP
Japan
Prior art keywords
electrode
connecting rods
notches
plasma cvd
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23942685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0428786B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Nobuo Nakamura
信夫 中村
Juichi Shimada
嶋田　寿一
Sunao Matsubara
松原　直
Haruo Ito
晴夫 伊藤
Shinichi Muramatsu
信一 村松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP23942685A priority Critical patent/JPS6299476A/ja
Publication of JPS6299476A publication Critical patent/JPS6299476A/ja
Publication of JPH0428786B2 publication Critical patent/JPH0428786B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Heating (AREA)
  • Chemical Vapour Deposition (AREA)
JP23942685A 1985-10-28 1985-10-28 プラズマｃｖｄ装置の放電電極 Granted JPS6299476A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23942685A JPS6299476A (ja) 1985-10-28 1985-10-28 プラズマｃｖｄ装置の放電電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23942685A JPS6299476A (ja) 1985-10-28 1985-10-28 プラズマｃｖｄ装置の放電電極

Publications (2)

Publication Number Publication Date
JPS6299476A true JPS6299476A (ja) 1987-05-08
JPH0428786B2 JPH0428786B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-15

Family

ID=17044595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23942685A Granted JPS6299476A (ja) 1985-10-28 1985-10-28 プラズマｃｖｄ装置の放電電極

Country Status (1)

Country Link
JP (1) JPS6299476A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS647263U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-06-26 1989-01-17
JP2015101790A (ja) * 2013-11-21 2015-06-04 アイクストロン、エスイー 炭素からなるナノ構造の製造装置および方法
CN104775106A (zh) * 2015-04-09 2015-07-15 山东禹城汉能薄膜太阳能有限公司 多片沉积pecvd非晶硅薄膜反应盒的电极板及非晶硅薄膜沉积方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5969141A (ja) * 1982-10-12 1984-04-19 Kokusai Electric Co Ltd 外熱形プラズマ化学気相生成装置の電極保持装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5969141A (ja) * 1982-10-12 1984-04-19 Kokusai Electric Co Ltd 外熱形プラズマ化学気相生成装置の電極保持装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS647263U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-06-26 1989-01-17
JP2015101790A (ja) * 2013-11-21 2015-06-04 アイクストロン、エスイー 炭素からなるナノ構造の製造装置および方法
CN104775106A (zh) * 2015-04-09 2015-07-15 山东禹城汉能薄膜太阳能有限公司 多片沉积pecvd非晶硅薄膜反应盒的电极板及非晶硅薄膜沉积方法

Also Published As

Publication number Publication date
JPH0428786B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-15

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