JPH0428786B2 - - Google Patents

Info

Publication number
JPH0428786B2
JPH0428786B2 JP60239426A JP23942685A JPH0428786B2 JP H0428786 B2 JPH0428786 B2 JP H0428786B2 JP 60239426 A JP60239426 A JP 60239426A JP 23942685 A JP23942685 A JP 23942685A JP H0428786 B2 JPH0428786 B2 JP H0428786B2
Authority
JP
Japan
Prior art keywords
electrode
electrodes
connecting rod
stacked
electrode plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60239426A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6299476A (ja
Inventor
Nobuo Nakamura
Juichi Shimada
Sunao Matsubara
Haruo Ito
Shinichi Muramatsu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP23942685A priority Critical patent/JPS6299476A/ja
Publication of JPS6299476A publication Critical patent/JPS6299476A/ja
Publication of JPH0428786B2 publication Critical patent/JPH0428786B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Heating (AREA)
  • Chemical Vapour Deposition (AREA)
JP23942685A 1985-10-28 1985-10-28 プラズマｃｖｄ装置の放電電極 Granted JPS6299476A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23942685A JPS6299476A (ja) 1985-10-28 1985-10-28 プラズマｃｖｄ装置の放電電極

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23942685A JPS6299476A (ja) 1985-10-28 1985-10-28 プラズマｃｖｄ装置の放電電極

Publications (2)

Publication Number Publication Date
JPS6299476A JPS6299476A (ja) 1987-05-08
JPH0428786B2 true JPH0428786B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-15

Family

ID=17044595

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23942685A Granted JPS6299476A (ja) 1985-10-28 1985-10-28 プラズマｃｖｄ装置の放電電極

Country Status (1)

Country Link
JP (1) JPS6299476A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH057240Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1987-06-26 1993-02-24
DE102013112855A1 (de) * 2013-11-21 2015-05-21 Aixtron Se Vorrichtung und Verfahren zum Fertigen von aus Kohlenstoff bestehenden Nanostrukturen
CN104775106B (zh) * 2015-04-09 2017-08-08 山东禹城汉能薄膜太阳能有限公司 多片沉积pecvd非晶硅薄膜反应盒的电极板及非晶硅薄膜沉积方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5969141A (ja) * 1982-10-12 1984-04-19 Kokusai Electric Co Ltd 外熱形プラズマ化学気相生成装置の電極保持装置

Also Published As

Publication number Publication date
JPS6299476A (ja) 1987-05-08

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term