JPS629725Y2 - - Google Patents

Info

Publication number
JPS629725Y2
JPS629725Y2 JP1982123770U JP12377082U JPS629725Y2 JP S629725 Y2 JPS629725 Y2 JP S629725Y2 JP 1982123770 U JP1982123770 U JP 1982123770U JP 12377082 U JP12377082 U JP 12377082U JP S629725 Y2 JPS629725 Y2 JP S629725Y2
Authority
JP
Japan
Prior art keywords
semiconductor substrate
lid
roller
semiconductor substrates
pedestal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982123770U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5929038U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1982123770U priority Critical patent/JPS5929038U/ja
Publication of JPS5929038U publication Critical patent/JPS5929038U/ja
Application granted granted Critical
Publication of JPS629725Y2 publication Critical patent/JPS629725Y2/ja
Granted legal-status Critical Current

Links

JP1982123770U 1982-08-17 1982-08-17 半導体基板の整列装置 Granted JPS5929038U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1982123770U JPS5929038U (ja) 1982-08-17 1982-08-17 半導体基板の整列装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1982123770U JPS5929038U (ja) 1982-08-17 1982-08-17 半導体基板の整列装置

Publications (2)

Publication Number Publication Date
JPS5929038U JPS5929038U (ja) 1984-02-23
JPS629725Y2 true JPS629725Y2 (enExample) 1987-03-06

Family

ID=30282404

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1982123770U Granted JPS5929038U (ja) 1982-08-17 1982-08-17 半導体基板の整列装置

Country Status (1)

Country Link
JP (1) JPS5929038U (enExample)

Also Published As

Publication number Publication date
JPS5929038U (ja) 1984-02-23

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