JPS629715Y2 - - Google Patents

Info

Publication number
JPS629715Y2
JPS629715Y2 JP1979067086U JP6708679U JPS629715Y2 JP S629715 Y2 JPS629715 Y2 JP S629715Y2 JP 1979067086 U JP1979067086 U JP 1979067086U JP 6708679 U JP6708679 U JP 6708679U JP S629715 Y2 JPS629715 Y2 JP S629715Y2
Authority
JP
Japan
Prior art keywords
stage
wafer
alignment mechanism
alignment
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979067086U
Other languages
English (en)
Japanese (ja)
Other versions
JPS55167653U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979067086U priority Critical patent/JPS629715Y2/ja
Publication of JPS55167653U publication Critical patent/JPS55167653U/ja
Application granted granted Critical
Publication of JPS629715Y2 publication Critical patent/JPS629715Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP1979067086U 1979-05-18 1979-05-18 Expired JPS629715Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979067086U JPS629715Y2 (OSRAM) 1979-05-18 1979-05-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979067086U JPS629715Y2 (OSRAM) 1979-05-18 1979-05-18

Publications (2)

Publication Number Publication Date
JPS55167653U JPS55167653U (OSRAM) 1980-12-02
JPS629715Y2 true JPS629715Y2 (OSRAM) 1987-03-06

Family

ID=29301016

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979067086U Expired JPS629715Y2 (OSRAM) 1979-05-18 1979-05-18

Country Status (1)

Country Link
JP (1) JPS629715Y2 (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20030096435A (ko) 1996-11-28 2003-12-31 가부시키가이샤 니콘 노광장치 및 노광방법
US7289212B2 (en) 2000-08-24 2007-10-30 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufacturing thereby
US7561270B2 (en) 2000-08-24 2009-07-14 Asml Netherlands B.V. Lithographic apparatus, device manufacturing method and device manufactured thereby
TW527526B (en) 2000-08-24 2003-04-11 Asml Netherlands Bv Lithographic apparatus, device manufacturing method, and device manufactured thereby

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1477150A (en) * 1974-08-21 1977-06-22 Ciba Geigy Ag Pigment compositions
JPS5421278U (OSRAM) * 1977-07-14 1979-02-10
JPS5455274U (OSRAM) * 1977-09-26 1979-04-17

Also Published As

Publication number Publication date
JPS55167653U (OSRAM) 1980-12-02

Similar Documents

Publication Publication Date Title
US3752589A (en) Method and apparatus for positioning patterns of a photographic mask on the surface of a wafer on the basis of backside patterns of the wafer
US3865483A (en) Alignment illumination system
US3476476A (en) Alignment means for photo repeat machine
KR100678404B1 (ko) 양면 투영 노광 장치
CN110187608A (zh) 一种直写式曝光机的曝光方法
JPS629715Y2 (OSRAM)
JPH08137091A (ja) マスク外観検査装置
TWI257531B (en) Catadioptric lithography system and method with reticle stage orthogonal to wafer stage
JPS6398645A (ja) 感光材料の位置決め保持装置
JPS6080812A (ja) カメラの光学系駆動装置
JPH0469939B2 (OSRAM)
JP2759890B2 (ja) 露光装置
JPH1012696A (ja) 基板搬送装置
US3740138A (en) Process camera alignment and exposure system
JPH01261821A (ja) 縮小投影露光装置
JP2910867B2 (ja) レジスト露光装置
JP2000315638A (ja) アライメント方法とその装置
JPH11338162A (ja) 露光装置
JPS59117121A (ja) 投影型マスクアライナ
JP3219925B2 (ja) 周辺露光装置及び周辺露光方法
JP2000173895A (ja) 露光装置
US4361398A (en) Reprographic camera
KR0163091B1 (ko) 노광장치
JP2000066418A (ja) 露光装置及び露光方法
JP2023133341A (ja) 基板撮像装置及び基板撮像方法