JPS6295408A - 間隔測定方法 - Google Patents

間隔測定方法

Info

Publication number
JPS6295408A
JPS6295408A JP23457585A JP23457585A JPS6295408A JP S6295408 A JPS6295408 A JP S6295408A JP 23457585 A JP23457585 A JP 23457585A JP 23457585 A JP23457585 A JP 23457585A JP S6295408 A JPS6295408 A JP S6295408A
Authority
JP
Japan
Prior art keywords
electrode
light
measured
image
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP23457585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410966B2 (enExample
Inventor
Kenichi Ogiso
小木曽　健一
Ritsuo Ishida
石田　律雄
Junichi Takada
純一 高田
Tateo Sakai
阪井　健郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP23457585A priority Critical patent/JPS6295408A/ja
Publication of JPS6295408A publication Critical patent/JPS6295408A/ja
Publication of JPH0410966B2 publication Critical patent/JPH0410966B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP23457585A 1985-10-22 1985-10-22 間隔測定方法 Granted JPS6295408A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP23457585A JPS6295408A (ja) 1985-10-22 1985-10-22 間隔測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP23457585A JPS6295408A (ja) 1985-10-22 1985-10-22 間隔測定方法

Publications (2)

Publication Number Publication Date
JPS6295408A true JPS6295408A (ja) 1987-05-01
JPH0410966B2 JPH0410966B2 (enExample) 1992-02-27

Family

ID=16973161

Family Applications (1)

Application Number Title Priority Date Filing Date
JP23457585A Granted JPS6295408A (ja) 1985-10-22 1985-10-22 間隔測定方法

Country Status (1)

Country Link
JP (1) JPS6295408A (enExample)

Also Published As

Publication number Publication date
JPH0410966B2 (enExample) 1992-02-27

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