JPS6293363U - - Google Patents

Info

Publication number
JPS6293363U
JPS6293363U JP1985186992U JP18699285U JPS6293363U JP S6293363 U JPS6293363 U JP S6293363U JP 1985186992 U JP1985186992 U JP 1985186992U JP 18699285 U JP18699285 U JP 18699285U JP S6293363 U JPS6293363 U JP S6293363U
Authority
JP
Japan
Prior art keywords
substrate
evaporation sources
electron beam
thin film
gas inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1985186992U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0318500Y2 (enrdf_load_html_response
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985186992U priority Critical patent/JPH0318500Y2/ja
Publication of JPS6293363U publication Critical patent/JPS6293363U/ja
Application granted granted Critical
Publication of JPH0318500Y2 publication Critical patent/JPH0318500Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Thermal Transfer Or Thermal Recording In General (AREA)
JP1985186992U 1985-12-04 1985-12-04 Expired JPH0318500Y2 (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985186992U JPH0318500Y2 (enrdf_load_html_response) 1985-12-04 1985-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985186992U JPH0318500Y2 (enrdf_load_html_response) 1985-12-04 1985-12-04

Publications (2)

Publication Number Publication Date
JPS6293363U true JPS6293363U (enrdf_load_html_response) 1987-06-15
JPH0318500Y2 JPH0318500Y2 (enrdf_load_html_response) 1991-04-18

Family

ID=31137054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985186992U Expired JPH0318500Y2 (enrdf_load_html_response) 1985-12-04 1985-12-04

Country Status (1)

Country Link
JP (1) JPH0318500Y2 (enrdf_load_html_response)

Also Published As

Publication number Publication date
JPH0318500Y2 (enrdf_load_html_response) 1991-04-18

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