JPH0418670U - - Google Patents

Info

Publication number
JPH0418670U
JPH0418670U JP6021490U JP6021490U JPH0418670U JP H0418670 U JPH0418670 U JP H0418670U JP 6021490 U JP6021490 U JP 6021490U JP 6021490 U JP6021490 U JP 6021490U JP H0418670 U JPH0418670 U JP H0418670U
Authority
JP
Japan
Prior art keywords
plasma
substrate
substrate holder
heating means
divided
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6021490U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6021490U priority Critical patent/JPH0418670U/ja
Publication of JPH0418670U publication Critical patent/JPH0418670U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP6021490U 1990-06-08 1990-06-08 Pending JPH0418670U (enrdf_load_html_response)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6021490U JPH0418670U (enrdf_load_html_response) 1990-06-08 1990-06-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6021490U JPH0418670U (enrdf_load_html_response) 1990-06-08 1990-06-08

Publications (1)

Publication Number Publication Date
JPH0418670U true JPH0418670U (enrdf_load_html_response) 1992-02-17

Family

ID=31587386

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6021490U Pending JPH0418670U (enrdf_load_html_response) 1990-06-08 1990-06-08

Country Status (1)

Country Link
JP (1) JPH0418670U (enrdf_load_html_response)

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