JPS629322Y2 - - Google Patents

Info

Publication number
JPS629322Y2
JPS629322Y2 JP1983064054U JP6405483U JPS629322Y2 JP S629322 Y2 JPS629322 Y2 JP S629322Y2 JP 1983064054 U JP1983064054 U JP 1983064054U JP 6405483 U JP6405483 U JP 6405483U JP S629322 Y2 JPS629322 Y2 JP S629322Y2
Authority
JP
Japan
Prior art keywords
substrate
substrate support
cooling
bottom wall
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1983064054U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59169354U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6405483U priority Critical patent/JPS59169354U/ja
Publication of JPS59169354U publication Critical patent/JPS59169354U/ja
Application granted granted Critical
Publication of JPS629322Y2 publication Critical patent/JPS629322Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Chemical Vapour Deposition (AREA)
JP6405483U 1983-04-29 1983-04-29 成膜装置 Granted JPS59169354U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6405483U JPS59169354U (ja) 1983-04-29 1983-04-29 成膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6405483U JPS59169354U (ja) 1983-04-29 1983-04-29 成膜装置

Publications (2)

Publication Number Publication Date
JPS59169354U JPS59169354U (ja) 1984-11-13
JPS629322Y2 true JPS629322Y2 (cs) 1987-03-04

Family

ID=30194239

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6405483U Granted JPS59169354U (ja) 1983-04-29 1983-04-29 成膜装置

Country Status (1)

Country Link
JP (1) JPS59169354U (cs)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5489350U (cs) * 1977-12-07 1979-06-25
JPS55100973A (en) * 1979-01-23 1980-08-01 Ricoh Co Ltd Heating of base plate in vacuum deposition

Also Published As

Publication number Publication date
JPS59169354U (ja) 1984-11-13

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