JPH01110429U - - Google Patents
Info
- Publication number
- JPH01110429U JPH01110429U JP663988U JP663988U JPH01110429U JP H01110429 U JPH01110429 U JP H01110429U JP 663988 U JP663988 U JP 663988U JP 663988 U JP663988 U JP 663988U JP H01110429 U JPH01110429 U JP H01110429U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- heating
- cart
- reaction chamber
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 17
- 238000010438 heat treatment Methods 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 5
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP663988U JPH0624999Y2 (ja) | 1988-01-20 | 1988-01-20 | 成膜装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP663988U JPH0624999Y2 (ja) | 1988-01-20 | 1988-01-20 | 成膜装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01110429U true JPH01110429U (cs) | 1989-07-26 |
| JPH0624999Y2 JPH0624999Y2 (ja) | 1994-06-29 |
Family
ID=31210979
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP663988U Expired - Lifetime JPH0624999Y2 (ja) | 1988-01-20 | 1988-01-20 | 成膜装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0624999Y2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010196116A (ja) * | 2009-02-25 | 2010-09-09 | Shimadzu Corp | インライン成膜処理装置 |
-
1988
- 1988-01-20 JP JP663988U patent/JPH0624999Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010196116A (ja) * | 2009-02-25 | 2010-09-09 | Shimadzu Corp | インライン成膜処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0624999Y2 (ja) | 1994-06-29 |
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