JPS629302Y2 - - Google Patents
Info
- Publication number
- JPS629302Y2 JPS629302Y2 JP12160982U JP12160982U JPS629302Y2 JP S629302 Y2 JPS629302 Y2 JP S629302Y2 JP 12160982 U JP12160982 U JP 12160982U JP 12160982 U JP12160982 U JP 12160982U JP S629302 Y2 JPS629302 Y2 JP S629302Y2
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- reaction chamber
- processing apparatus
- processing
- exhaust port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012545 processing Methods 0.000 claims description 41
- 238000000034 method Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 239000004743 Polypropylene Substances 0.000 description 9
- 229920001155 polypropylene Polymers 0.000 description 9
- 238000009832 plasma treatment Methods 0.000 description 8
- 239000007789 gas Substances 0.000 description 6
- 239000011347 resin Substances 0.000 description 6
- 229920005989 resin Polymers 0.000 description 6
- 239000004698 Polyethylene Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229920000573 polyethylene Polymers 0.000 description 4
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- -1 polypropylene Polymers 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000003973 paint Substances 0.000 description 2
- 230000036470 plasma concentration Effects 0.000 description 2
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12160982U JPS5928535U (ja) | 1982-08-12 | 1982-08-12 | プラズマ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12160982U JPS5928535U (ja) | 1982-08-12 | 1982-08-12 | プラズマ処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5928535U JPS5928535U (ja) | 1984-02-22 |
| JPS629302Y2 true JPS629302Y2 (fr) | 1987-03-04 |
Family
ID=30278261
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12160982U Granted JPS5928535U (ja) | 1982-08-12 | 1982-08-12 | プラズマ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5928535U (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0348194Y2 (fr) * | 1985-04-30 | 1991-10-15 |
-
1982
- 1982-08-12 JP JP12160982U patent/JPS5928535U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5928535U (ja) | 1984-02-22 |
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