JPS6282638A - 二次電子検出器 - Google Patents

二次電子検出器

Info

Publication number
JPS6282638A
JPS6282638A JP60222832A JP22283285A JPS6282638A JP S6282638 A JPS6282638 A JP S6282638A JP 60222832 A JP60222832 A JP 60222832A JP 22283285 A JP22283285 A JP 22283285A JP S6282638 A JPS6282638 A JP S6282638A
Authority
JP
Japan
Prior art keywords
scintillator
glass tube
tube
fixed
bottomed glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60222832A
Other languages
English (en)
Japanese (ja)
Other versions
JPH056876B2 (enExample
Inventor
Hiroshi Yanagida
柳田 博司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Inc
Original Assignee
Ulvac Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Inc filed Critical Ulvac Inc
Priority to JP60222832A priority Critical patent/JPS6282638A/ja
Publication of JPS6282638A publication Critical patent/JPS6282638A/ja
Publication of JPH056876B2 publication Critical patent/JPH056876B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measurement Of Radiation (AREA)
JP60222832A 1985-10-08 1985-10-08 二次電子検出器 Granted JPS6282638A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60222832A JPS6282638A (ja) 1985-10-08 1985-10-08 二次電子検出器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60222832A JPS6282638A (ja) 1985-10-08 1985-10-08 二次電子検出器

Publications (2)

Publication Number Publication Date
JPS6282638A true JPS6282638A (ja) 1987-04-16
JPH056876B2 JPH056876B2 (enExample) 1993-01-27

Family

ID=16788607

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60222832A Granted JPS6282638A (ja) 1985-10-08 1985-10-08 二次電子検出器

Country Status (1)

Country Link
JP (1) JPS6282638A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002206278A (ja) * 2001-01-11 2002-07-26 Misawa Homes Co Ltd バルコニーの施工方法及びバルコニー構造
JP2012138324A (ja) * 2010-12-28 2012-07-19 Topcon Corp 二次電子検出器、及び荷電粒子ビーム装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002206278A (ja) * 2001-01-11 2002-07-26 Misawa Homes Co Ltd バルコニーの施工方法及びバルコニー構造
JP2012138324A (ja) * 2010-12-28 2012-07-19 Topcon Corp 二次電子検出器、及び荷電粒子ビーム装置

Also Published As

Publication number Publication date
JPH056876B2 (enExample) 1993-01-27

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