JPS6281036A - パタ−ン認識方法 - Google Patents

パタ−ン認識方法

Info

Publication number
JPS6281036A
JPS6281036A JP60220002A JP22000285A JPS6281036A JP S6281036 A JPS6281036 A JP S6281036A JP 60220002 A JP60220002 A JP 60220002A JP 22000285 A JP22000285 A JP 22000285A JP S6281036 A JPS6281036 A JP S6281036A
Authority
JP
Japan
Prior art keywords
pattern
edge
patterns
target
dimension
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60220002A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0523502B2 (enrdf_load_stackoverflow
Inventor
Susumu Komoriya
進 小森谷
Nobuyuki Irikita
信行 入来
Takayoshi Oosakaya
大坂谷　隆義
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP60220002A priority Critical patent/JPS6281036A/ja
Publication of JPS6281036A publication Critical patent/JPS6281036A/ja
Publication of JPH0523502B2 publication Critical patent/JPH0523502B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Image Analysis (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60220002A 1985-10-04 1985-10-04 パタ−ン認識方法 Granted JPS6281036A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60220002A JPS6281036A (ja) 1985-10-04 1985-10-04 パタ−ン認識方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60220002A JPS6281036A (ja) 1985-10-04 1985-10-04 パタ−ン認識方法

Publications (2)

Publication Number Publication Date
JPS6281036A true JPS6281036A (ja) 1987-04-14
JPH0523502B2 JPH0523502B2 (enrdf_load_stackoverflow) 1993-04-02

Family

ID=16744389

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60220002A Granted JPS6281036A (ja) 1985-10-04 1985-10-04 パタ−ン認識方法

Country Status (1)

Country Link
JP (1) JPS6281036A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05129178A (ja) * 1991-10-31 1993-05-25 Toshiba Corp 合せずれ測定方法
WO2002067198A1 (fr) * 2001-02-20 2002-08-29 Advantest Corporation Procede d'appariement d'images, appareil d'appariement d'images et dispositif de traitement de tranches

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05129178A (ja) * 1991-10-31 1993-05-25 Toshiba Corp 合せずれ測定方法
WO2002067198A1 (fr) * 2001-02-20 2002-08-29 Advantest Corporation Procede d'appariement d'images, appareil d'appariement d'images et dispositif de traitement de tranches

Also Published As

Publication number Publication date
JPH0523502B2 (enrdf_load_stackoverflow) 1993-04-02

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