JPS6280936A - フイ−ルドエミツタ−の製造方法 - Google Patents
フイ−ルドエミツタ−の製造方法Info
- Publication number
- JPS6280936A JPS6280936A JP60219833A JP21983385A JPS6280936A JP S6280936 A JPS6280936 A JP S6280936A JP 60219833 A JP60219833 A JP 60219833A JP 21983385 A JP21983385 A JP 21983385A JP S6280936 A JPS6280936 A JP S6280936A
- Authority
- JP
- Japan
- Prior art keywords
- emitter
- field
- tip
- manufacturing field
- field emitters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 238000000034 method Methods 0.000 title claims description 4
- 239000013078 crystal Substances 0.000 claims description 7
- 230000005684 electric field Effects 0.000 claims description 6
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 5
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 5
- 229910001882 dioxygen Inorganic materials 0.000 claims description 5
- 229910052719 titanium Inorganic materials 0.000 claims description 5
- 239000010936 titanium Substances 0.000 claims description 5
- 238000010894 electron beam technology Methods 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 1
- 238000001493 electron microscopy Methods 0.000 description 1
- 238000001239 high-resolution electron microscopy Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 150000003623 transition metal compounds Chemical class 0.000 description 1
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cold Cathode And The Manufacture (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60219833A JPS6280936A (ja) | 1985-10-02 | 1985-10-02 | フイ−ルドエミツタ−の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60219833A JPS6280936A (ja) | 1985-10-02 | 1985-10-02 | フイ−ルドエミツタ−の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6280936A true JPS6280936A (ja) | 1987-04-14 |
| JPH0577132B2 JPH0577132B2 (enrdf_load_stackoverflow) | 1993-10-26 |
Family
ID=16741760
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60219833A Granted JPS6280936A (ja) | 1985-10-02 | 1985-10-02 | フイ−ルドエミツタ−の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6280936A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63279535A (ja) * | 1987-05-08 | 1988-11-16 | Natl Inst For Res In Inorg Mater | 炭窒化ニオブフイ−ルドエミツタ−の製造方法 |
-
1985
- 1985-10-02 JP JP60219833A patent/JPS6280936A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63279535A (ja) * | 1987-05-08 | 1988-11-16 | Natl Inst For Res In Inorg Mater | 炭窒化ニオブフイ−ルドエミツタ−の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0577132B2 (enrdf_load_stackoverflow) | 1993-10-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP5794598B2 (ja) | 六ホウ化金属冷電界エミッター、その製造方法及び電子銃 | |
| Mackie et al. | Field emission from hafnium carbide | |
| JP2003331714A (ja) | 高角強度ショットキ電子点ソース | |
| JP2851727B2 (ja) | 放電灯用電極 | |
| JPS6280936A (ja) | フイ−ルドエミツタ−の製造方法 | |
| JP3440448B2 (ja) | 熱電界放射型電子銃 | |
| JPH0311054B2 (enrdf_load_stackoverflow) | ||
| JPH0421295B2 (enrdf_load_stackoverflow) | ||
| JP6804120B2 (ja) | エミッタ、それを用いた電子銃、それを用いた電子機器、および、その製造方法 | |
| JPH11273551A (ja) | 窒化ホウ素を用いた電子放出素子及びその製造方法 | |
| JPS5971232A (ja) | 表面酸化型炭化物フィールドエミッターの製造法 | |
| JPS6280938A (ja) | チタン化合物フイ−ルドエミツタ−の製造方法 | |
| KR20010029866A (ko) | 안정화된 ＺｒＯ2 레저버를 갖는 쇼트키 에미터 캐소드 | |
| JPH0461724A (ja) | 炭化ニオブフィールドエミッターの作製方法 | |
| Mousa | Characteristics of tungsten substrate with Al2O3 coatings under UHV conditions | |
| JPS6091528A (ja) | 遷移金属化合物からなるフイ−ルド・エミツタ− | |
| JPS6280937A (ja) | 高性能フイ−ルドエミツタ−の製造方法 | |
| JPS63279535A (ja) | 炭窒化ニオブフイ−ルドエミツタ−の製造方法 | |
| JPH0227643A (ja) | 熱電界放射電子銃の安定化方法 | |
| JPH0434253B2 (enrdf_load_stackoverflow) | ||
| JPH0533487B2 (enrdf_load_stackoverflow) | ||
| JPS6054735B2 (ja) | 電界放射陰極 | |
| SU439028A1 (ru) | Способ изготовлени автоэлектронных катодов | |
| JP2739966B2 (ja) | 熱電界放射電子源の製造方法 | |
| JPS6129093B2 (enrdf_load_stackoverflow) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |