JPS6280656A - フオトマスクブランクおよびフオトマスク - Google Patents

フオトマスクブランクおよびフオトマスク

Info

Publication number
JPS6280656A
JPS6280656A JP60221226A JP22122685A JPS6280656A JP S6280656 A JPS6280656 A JP S6280656A JP 60221226 A JP60221226 A JP 60221226A JP 22122685 A JP22122685 A JP 22122685A JP S6280656 A JPS6280656 A JP S6280656A
Authority
JP
Japan
Prior art keywords
film
light
photomask
thin film
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60221226A
Other languages
English (en)
Japanese (ja)
Other versions
JPS645288B2 (OSRAM
Inventor
Takehiro Taihichi
対比地　武博
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toppan Inc
Original Assignee
Toppan Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toppan Printing Co Ltd filed Critical Toppan Printing Co Ltd
Priority to JP60221226A priority Critical patent/JPS6280656A/ja
Publication of JPS6280656A publication Critical patent/JPS6280656A/ja
Publication of JPS645288B2 publication Critical patent/JPS645288B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
    • G03F1/40—Electrostatic discharge [ESD] related features, e.g. antistatic coatings or a conductive metal layer around the periphery of the mask substrate

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
JP60221226A 1985-10-04 1985-10-04 フオトマスクブランクおよびフオトマスク Granted JPS6280656A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60221226A JPS6280656A (ja) 1985-10-04 1985-10-04 フオトマスクブランクおよびフオトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60221226A JPS6280656A (ja) 1985-10-04 1985-10-04 フオトマスクブランクおよびフオトマスク

Publications (2)

Publication Number Publication Date
JPS6280656A true JPS6280656A (ja) 1987-04-14
JPS645288B2 JPS645288B2 (OSRAM) 1989-01-30

Family

ID=16763442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60221226A Granted JPS6280656A (ja) 1985-10-04 1985-10-04 フオトマスクブランクおよびフオトマスク

Country Status (1)

Country Link
JP (1) JPS6280656A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5196283A (en) * 1989-03-09 1993-03-23 Canon Kabushiki Kaisha X-ray mask structure, and x-ray exposure process

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764739A (en) * 1980-10-09 1982-04-20 Dainippon Printing Co Ltd Photomask substrate and photomask
JPS57161856A (en) * 1981-03-31 1982-10-05 Dainippon Printing Co Ltd Photomask
JPS57161857A (en) * 1981-03-31 1982-10-05 Dainippon Printing Co Ltd Photomask blank plate
JPS5856381A (ja) * 1981-09-29 1983-04-04 富士通株式会社 マグネトロン・スパツタリング装置によるＴａ↓２Ｎ膜生成方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5764739A (en) * 1980-10-09 1982-04-20 Dainippon Printing Co Ltd Photomask substrate and photomask
JPS57161856A (en) * 1981-03-31 1982-10-05 Dainippon Printing Co Ltd Photomask
JPS57161857A (en) * 1981-03-31 1982-10-05 Dainippon Printing Co Ltd Photomask blank plate
JPS5856381A (ja) * 1981-09-29 1983-04-04 富士通株式会社 マグネトロン・スパツタリング装置によるＴａ↓２Ｎ膜生成方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5196283A (en) * 1989-03-09 1993-03-23 Canon Kabushiki Kaisha X-ray mask structure, and x-ray exposure process
US5773177A (en) * 1989-03-09 1998-06-30 Canon Kabushiki Kaisha X-ray mask structure, and X-ray exposure process

Also Published As

Publication number Publication date
JPS645288B2 (OSRAM) 1989-01-30

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