JPS627974B2 - - Google Patents
Info
- Publication number
- JPS627974B2 JPS627974B2 JP52012866A JP1286677A JPS627974B2 JP S627974 B2 JPS627974 B2 JP S627974B2 JP 52012866 A JP52012866 A JP 52012866A JP 1286677 A JP1286677 A JP 1286677A JP S627974 B2 JPS627974 B2 JP S627974B2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- sample
- scanning
- ray
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 claims description 34
- 238000002441 X-ray diffraction Methods 0.000 claims 1
- 239000013078 crystal Substances 0.000 description 20
- 238000001514 detection method Methods 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005211 surface analysis Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1286677A JPS5397895A (en) | 1977-02-08 | 1977-02-08 | X-ray analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1286677A JPS5397895A (en) | 1977-02-08 | 1977-02-08 | X-ray analyzer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5397895A JPS5397895A (en) | 1978-08-26 |
JPS627974B2 true JPS627974B2 (fr) | 1987-02-20 |
Family
ID=11817325
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1286677A Granted JPS5397895A (en) | 1977-02-08 | 1977-02-08 | X-ray analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5397895A (fr) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6076652A (ja) * | 1983-09-30 | 1985-05-01 | Shimadzu Corp | 走査x線像の形成方法 |
-
1977
- 1977-02-08 JP JP1286677A patent/JPS5397895A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5397895A (en) | 1978-08-26 |
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