JPS627857A - 真空蒸着用溶融金属の吹出防止方法 - Google Patents
真空蒸着用溶融金属の吹出防止方法Info
- Publication number
- JPS627857A JPS627857A JP14448385A JP14448385A JPS627857A JP S627857 A JPS627857 A JP S627857A JP 14448385 A JP14448385 A JP 14448385A JP 14448385 A JP14448385 A JP 14448385A JP S627857 A JPS627857 A JP S627857A
- Authority
- JP
- Japan
- Prior art keywords
- jacket
- pressure
- molten metal
- metal
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 title claims abstract description 54
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 54
- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims description 13
- 238000007664 blowing Methods 0.000 title description 3
- 238000007738 vacuum evaporation Methods 0.000 claims abstract description 29
- 238000001704 evaporation Methods 0.000 claims abstract description 25
- 230000008020 evaporation Effects 0.000 claims abstract description 24
- 238000010438 heat treatment Methods 0.000 claims abstract description 24
- 230000008018 melting Effects 0.000 claims abstract description 13
- 238000002844 melting Methods 0.000 claims abstract description 13
- 239000007788 liquid Substances 0.000 claims abstract description 6
- 238000000151 deposition Methods 0.000 claims description 12
- 230000008021 deposition Effects 0.000 claims description 11
- 230000000694 effects Effects 0.000 claims description 5
- 238000005485 electric heating Methods 0.000 claims description 4
- 238000007740 vapor deposition Methods 0.000 abstract description 10
- 230000005484 gravity Effects 0.000 abstract description 3
- 239000000758 substrate Substances 0.000 abstract description 3
- 229910000831 Steel Inorganic materials 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000010959 steel Substances 0.000 description 5
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 229910052725 zinc Inorganic materials 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000012530 fluid Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/246—Replenishment of source material
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14448385A JPS627857A (ja) | 1985-07-03 | 1985-07-03 | 真空蒸着用溶融金属の吹出防止方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14448385A JPS627857A (ja) | 1985-07-03 | 1985-07-03 | 真空蒸着用溶融金属の吹出防止方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS627857A true JPS627857A (ja) | 1987-01-14 |
| JPH0328511B2 JPH0328511B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-04-19 |
Family
ID=15363363
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14448385A Granted JPS627857A (ja) | 1985-07-03 | 1985-07-03 | 真空蒸着用溶融金属の吹出防止方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS627857A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0450011U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1990-09-04 | 1992-04-27 | ||
| JPH051404U (ja) * | 1991-06-26 | 1993-01-14 | 株式会社貝印刃物開発センター | 爪切り及びｔ型剃刀及び替刃式メス |
| WO2008040329A1 (de) * | 2006-09-29 | 2008-04-10 | Von Ardenne Anlagentechnik Gmbh | Vakuumbeschichtungsverfahren und anordnung zur durchführung des verfahrens |
| US20230152612A1 (en) * | 2020-08-07 | 2023-05-18 | Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Reflection rate detection device and reflection rate detection method for liquid crystal panel |
-
1985
- 1985-07-03 JP JP14448385A patent/JPS627857A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0450011U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1990-09-04 | 1992-04-27 | ||
| JPH051404U (ja) * | 1991-06-26 | 1993-01-14 | 株式会社貝印刃物開発センター | 爪切り及びｔ型剃刀及び替刃式メス |
| WO2008040329A1 (de) * | 2006-09-29 | 2008-04-10 | Von Ardenne Anlagentechnik Gmbh | Vakuumbeschichtungsverfahren und anordnung zur durchführung des verfahrens |
| US20230152612A1 (en) * | 2020-08-07 | 2023-05-18 | Shenzhen China Star Optoelectronics Semiconductor Display Technology Co., Ltd. | Reflection rate detection device and reflection rate detection method for liquid crystal panel |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0328511B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-04-19 |
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