JPS627681B2 - - Google Patents

Info

Publication number

JPS627681B2

JPS627681B2 JP53064812A JP6481278A JPS627681B2 JP S627681 B2 JPS627681 B2 JP S627681B2 JP 53064812 A JP53064812 A JP 53064812A JP 6481278 A JP6481278 A JP 6481278A JP S627681 B2 JPS627681 B2 JP S627681B2

Authority

JP

Japan

Prior art keywords

humidity

sensitive

polyheteroacid

acid

electrical resistance

Prior art date

1978-05-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

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• Global Dossier
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• 239000000463 material Substances 0.000 claims description 18
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 14
• 239000000126 substance Substances 0.000 claims description 8
• 229910052710 silicon Inorganic materials 0.000 claims description 6
• 239000013078 crystal Substances 0.000 claims description 3
• 239000002253 acid Substances 0.000 description 5
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
• 229910052799 carbon Inorganic materials 0.000 description 4
• 238000002425 crystallisation Methods 0.000 description 4
• 230000008025 crystallization Effects 0.000 description 4
• 239000010703 silicon Substances 0.000 description 4
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
• 239000000919 ceramic Substances 0.000 description 3
• 230000007423 decrease Effects 0.000 description 3
• 238000000465 moulding Methods 0.000 description 3
• DHRLEVQXOMLTIM-UHFFFAOYSA-N phosphoric acid;trioxomolybdenum Chemical group O=[Mo](=O)=O.O=[Mo](=O)=O.O=[Mo](=O)=O.O=[Mo](=O)=O.O=[Mo](=O)=O.O=[Mo](=O)=O.O=[Mo](=O)=O.O=[Mo](=O)=O.O=[Mo](=O)=O.O=[Mo](=O)=O.O=[Mo](=O)=O.O=[Mo](=O)=O.OP(O)(O)=O DHRLEVQXOMLTIM-UHFFFAOYSA-N 0.000 description 3
• NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
• 241001168730 Simo Species 0.000 description 2
• 230000002411 adverse Effects 0.000 description 2
• 239000011521 glass Substances 0.000 description 2
• KWGKDLIKAYFUFQ-UHFFFAOYSA-M lithium chloride Chemical compound [Li+].[Cl-] KWGKDLIKAYFUFQ-UHFFFAOYSA-M 0.000 description 2
• 238000005259 measurement Methods 0.000 description 2
• VLAPMBHFAWRUQP-UHFFFAOYSA-L molybdic acid Chemical compound O[Mo](O)(=O)=O VLAPMBHFAWRUQP-UHFFFAOYSA-L 0.000 description 2
• 239000004745 nonwoven fabric Substances 0.000 description 2
• 230000004043 responsiveness Effects 0.000 description 2
• 230000035945 sensitivity Effects 0.000 description 2
• 239000000243 solution Substances 0.000 description 2
• 239000000758 substrate Substances 0.000 description 2
• CMPGARWFYBADJI-UHFFFAOYSA-L tungstic acid Chemical compound O[W](O)(=O)=O CMPGARWFYBADJI-UHFFFAOYSA-L 0.000 description 2
• 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
• 239000007864 aqueous solution Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 238000001035 drying Methods 0.000 description 1
• 230000005684 electric field Effects 0.000 description 1
• 239000003792 electrolyte Substances 0.000 description 1
• 239000000835 fiber Substances 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1
• IYDGMDWEHDFVQI-UHFFFAOYSA-N phosphoric acid;trioxotungsten Chemical compound O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.O=[W](=O)=O.OP(O)(O)=O IYDGMDWEHDFVQI-UHFFFAOYSA-N 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1
• 230000004044 response Effects 0.000 description 1
• 230000002441 reversible effect Effects 0.000 description 1
• 239000004065 semiconductor Substances 0.000 description 1