JPS6276731A - 超音波ボンデイング検査方法及び装置 - Google Patents

超音波ボンデイング検査方法及び装置

Info

Publication number
JPS6276731A
JPS6276731A JP60216879A JP21687985A JPS6276731A JP S6276731 A JPS6276731 A JP S6276731A JP 60216879 A JP60216879 A JP 60216879A JP 21687985 A JP21687985 A JP 21687985A JP S6276731 A JPS6276731 A JP S6276731A
Authority
JP
Japan
Prior art keywords
bonding
waveform
ultrasonic
memory
features
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60216879A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0548624B2 (cg-RX-API-DMAC10.html
Inventor
Mitsusada Shibasaka
柴坂　光貞
Masayuki Okino
沖野　雅之
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Mechatronics Co Ltd
Toshiba Corp
Original Assignee
Toshiba Corp
Toshiba Seiki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Toshiba Seiki Co Ltd filed Critical Toshiba Corp
Priority to JP60216879A priority Critical patent/JPS6276731A/ja
Publication of JPS6276731A publication Critical patent/JPS6276731A/ja
Publication of JPH0548624B2 publication Critical patent/JPH0548624B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W72/0711—
    • H10W70/093—
    • H10W72/07141—
    • H10W72/075—
    • H10W72/07521—
    • H10W72/07531—
    • H10W72/07533—
    • H10W72/536—
    • H10W72/5363—

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Wire Bonding (AREA)
JP60216879A 1985-09-30 1985-09-30 超音波ボンデイング検査方法及び装置 Granted JPS6276731A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60216879A JPS6276731A (ja) 1985-09-30 1985-09-30 超音波ボンデイング検査方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60216879A JPS6276731A (ja) 1985-09-30 1985-09-30 超音波ボンデイング検査方法及び装置

Publications (2)

Publication Number Publication Date
JPS6276731A true JPS6276731A (ja) 1987-04-08
JPH0548624B2 JPH0548624B2 (cg-RX-API-DMAC10.html) 1993-07-22

Family

ID=16695342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60216879A Granted JPS6276731A (ja) 1985-09-30 1985-09-30 超音波ボンデイング検査方法及び装置

Country Status (1)

Country Link
JP (1) JPS6276731A (cg-RX-API-DMAC10.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5608855A (en) * 1991-09-09 1997-03-04 Hitachi, Ltd. Method of and system for displaying three-dimensional curve on two-dimensional display device
US8714015B2 (en) 2009-03-31 2014-05-06 Toyota Jidosha Kabushiki Kaisha Joint quality inspection and joint quality inspection method
CN111599709A (zh) * 2020-05-29 2020-08-28 上海华力微电子有限公司 一种晶圆键合界面缺陷的检测方法及存储介质

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197940A (ja) * 1984-10-19 1986-05-16 Hitachi Ltd 電子部品用検査装置
JPS61144837A (ja) * 1984-12-19 1986-07-02 Seiko Epson Corp ボンデイング検査装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6197940A (ja) * 1984-10-19 1986-05-16 Hitachi Ltd 電子部品用検査装置
JPS61144837A (ja) * 1984-12-19 1986-07-02 Seiko Epson Corp ボンデイング検査装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5608855A (en) * 1991-09-09 1997-03-04 Hitachi, Ltd. Method of and system for displaying three-dimensional curve on two-dimensional display device
US8714015B2 (en) 2009-03-31 2014-05-06 Toyota Jidosha Kabushiki Kaisha Joint quality inspection and joint quality inspection method
CN111599709A (zh) * 2020-05-29 2020-08-28 上海华力微电子有限公司 一种晶圆键合界面缺陷的检测方法及存储介质
CN111599709B (zh) * 2020-05-29 2022-03-29 上海华力微电子有限公司 一种晶圆键合界面缺陷的检测方法及存储介质

Also Published As

Publication number Publication date
JPH0548624B2 (cg-RX-API-DMAC10.html) 1993-07-22

Similar Documents

Publication Publication Date Title
JPH11297761A (ja) 電子部品の実装方法及び実装装置
EP0046636B1 (en) Ultrasonic bond energy monitor
US4998664A (en) Bond signature analyzer
US4984730A (en) Quality control for wire bonding
JP5310841B2 (ja) 接合品質検査装置及び接合品質検査方法
JP5960292B2 (ja) 接合状態検査方法
CA1181933A (en) Method and apparatus for ultrasonic bonding
JPS63191927A (ja) ボンデイング工程中のボンデイングパラメータ監視装置
JP2003152033A (ja) ボンディングした接続をテストする方法及びワイヤボンダー
Zhang et al. Monitoring wire bonding via time-frequency analysis of horn vibration
JPS6276731A (ja) 超音波ボンデイング検査方法及び装置
JP3025648B2 (ja) 半導体のボンディング不良検出装置
JPH09270440A (ja) 半導体実装方法とその半導体実装装置
US20040256438A1 (en) Method for checking the quality of a wedge bond
Feng et al. Monitoring of the ultrasonic wire bonding quality based on system impedance
Harman Acoustic-emission-monitored tests for TAB inner lead bond quality
JPH056661Y2 (cg-RX-API-DMAC10.html)
Zhang et al. Improved monitoring of ultrasonic wire bonding via input electrical impedance
JPH06232232A (ja) 超音波を用いたワイヤーボンディングの評価測定方法およびその装置
JPS6377131A (ja) 半導体装置の検査方法
Mayer In situ Monitoring of Microjoining Processes
JP2019140346A (ja) ワイヤボンディング装置およびワイヤボンディング方法
KR20240122901A (ko) 반도체 장치 제조 장치 및 검사 방법
JPS61237438A (ja) ボンデイング検査方式
JPS6112040A (ja) 半導体装置の検査方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term