JPS627271B2 - - Google Patents

Info

Publication number
JPS627271B2
JPS627271B2 JP16217779A JP16217779A JPS627271B2 JP S627271 B2 JPS627271 B2 JP S627271B2 JP 16217779 A JP16217779 A JP 16217779A JP 16217779 A JP16217779 A JP 16217779A JP S627271 B2 JPS627271 B2 JP S627271B2
Authority
JP
Japan
Prior art keywords
electrode
sample
etched
dry etching
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16217779A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5687671A (en
Inventor
Tsutomu Tsukada
Katsuzo Ukai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP16217779A priority Critical patent/JPS5687671A/ja
Publication of JPS5687671A publication Critical patent/JPS5687671A/ja
Publication of JPS627271B2 publication Critical patent/JPS627271B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP16217779A 1979-12-15 1979-12-15 Dry etching apparatus Granted JPS5687671A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16217779A JPS5687671A (en) 1979-12-15 1979-12-15 Dry etching apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16217779A JPS5687671A (en) 1979-12-15 1979-12-15 Dry etching apparatus

Publications (2)

Publication Number Publication Date
JPS5687671A JPS5687671A (en) 1981-07-16
JPS627271B2 true JPS627271B2 (enrdf_load_stackoverflow) 1987-02-16

Family

ID=15749473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16217779A Granted JPS5687671A (en) 1979-12-15 1979-12-15 Dry etching apparatus

Country Status (1)

Country Link
JP (1) JPS5687671A (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4392938A (en) * 1981-11-12 1983-07-12 Varian Associates, Inc. Radio frequency etch table with biased extension member
JPS6056076A (ja) * 1983-09-08 1985-04-01 Ulvac Corp スパツタエツチング装置

Also Published As

Publication number Publication date
JPS5687671A (en) 1981-07-16

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