JPS6271158A - 半導体装置の解析装置 - Google Patents

半導体装置の解析装置

Info

Publication number
JPS6271158A
JPS6271158A JP60211742A JP21174285A JPS6271158A JP S6271158 A JPS6271158 A JP S6271158A JP 60211742 A JP60211742 A JP 60211742A JP 21174285 A JP21174285 A JP 21174285A JP S6271158 A JPS6271158 A JP S6271158A
Authority
JP
Japan
Prior art keywords
semiconductor device
moving
cutting
observing
circuits
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60211742A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0580785B2 (enrdf_load_stackoverflow
Inventor
Minoru Nozoe
野添　実
Nobuo Asada
信雄 浅田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP60211742A priority Critical patent/JPS6271158A/ja
Publication of JPS6271158A publication Critical patent/JPS6271158A/ja
Publication of JPH0580785B2 publication Critical patent/JPH0580785B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP60211742A 1985-09-25 1985-09-25 半導体装置の解析装置 Granted JPS6271158A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60211742A JPS6271158A (ja) 1985-09-25 1985-09-25 半導体装置の解析装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60211742A JPS6271158A (ja) 1985-09-25 1985-09-25 半導体装置の解析装置

Publications (2)

Publication Number Publication Date
JPS6271158A true JPS6271158A (ja) 1987-04-01
JPH0580785B2 JPH0580785B2 (enrdf_load_stackoverflow) 1993-11-10

Family

ID=16610832

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60211742A Granted JPS6271158A (ja) 1985-09-25 1985-09-25 半導体装置の解析装置

Country Status (1)

Country Link
JP (1) JPS6271158A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6418071A (en) * 1987-07-13 1989-01-20 Hamamatsu Photonics Kk Detecting apparatus for voltage
DE102008045336A1 (de) * 2008-09-01 2010-03-11 Carl Zeiss Nts Gmbh System zur Bearbeitung einer Probe mit einem Laserstrahl und einem Elektronenstrahl oder einem Ionenstrahl
DE102010008296A1 (de) * 2010-02-17 2011-08-18 Carl Zeiss NTS GmbH, 73447 Laserbearbeitungssystem, Objekthalter und Laserbearbeitungsverfahren

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6418071A (en) * 1987-07-13 1989-01-20 Hamamatsu Photonics Kk Detecting apparatus for voltage
DE102008045336A1 (de) * 2008-09-01 2010-03-11 Carl Zeiss Nts Gmbh System zur Bearbeitung einer Probe mit einem Laserstrahl und einem Elektronenstrahl oder einem Ionenstrahl
US8115180B2 (en) 2008-09-01 2012-02-14 Carl Zeiss Nts Gmbh Processing system
US8350227B2 (en) 2008-09-01 2013-01-08 Carl Zeiss Microscopy Gmbh Processing system
US8558174B2 (en) 2008-09-01 2013-10-15 Carl Zeiss Microscopy Gmbh Processing system
DE102008045336B4 (de) 2008-09-01 2022-05-25 Carl Zeiss Microscopy Gmbh System zur Bearbeitung einer Probe mit einem Laserstrahl und einem Elektronenstrahl oder einem Ionenstrahl
DE102010008296A1 (de) * 2010-02-17 2011-08-18 Carl Zeiss NTS GmbH, 73447 Laserbearbeitungssystem, Objekthalter und Laserbearbeitungsverfahren
JP2011167763A (ja) * 2010-02-17 2011-09-01 Carl Zeiss Nts Gmbh レーザ処理システム、対象物台、およびレーザ処理方法
CN102229023A (zh) * 2010-02-17 2011-11-02 卡尔蔡司Nts有限责任公司 激光处理系统，载物件和激光处理方法
US8841579B2 (en) 2010-02-17 2014-09-23 Carl Zeiss Microscopy Gmbh Laser processing system, object mount and laser processing method
CN102229023B (zh) * 2010-02-17 2016-01-20 卡尔蔡司显微镜有限责任公司 激光处理系统，载物件和激光处理方法

Also Published As

Publication number Publication date
JPH0580785B2 (enrdf_load_stackoverflow) 1993-11-10

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