JPS626686Y2 - - Google Patents
Info
- Publication number
- JPS626686Y2 JPS626686Y2 JP14031581U JP14031581U JPS626686Y2 JP S626686 Y2 JPS626686 Y2 JP S626686Y2 JP 14031581 U JP14031581 U JP 14031581U JP 14031581 U JP14031581 U JP 14031581U JP S626686 Y2 JPS626686 Y2 JP S626686Y2
- Authority
- JP
- Japan
- Prior art keywords
- sheet
- filter
- adhesive sheet
- transparent
- pellets
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000008188 pellet Substances 0.000 claims description 20
- 239000004065 semiconductor Substances 0.000 claims description 11
- 239000000853 adhesive Substances 0.000 claims description 10
- 230000001070 adhesive effect Effects 0.000 claims description 10
- 230000003287 optical effect Effects 0.000 claims description 5
- 238000009826 distribution Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000004698 Polyethylene Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 238000005453 pelletization Methods 0.000 description 1
- -1 polyethylene Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14031581U JPS5844849U (ja) | 1981-09-21 | 1981-09-21 | 半導体ペレット用照明装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14031581U JPS5844849U (ja) | 1981-09-21 | 1981-09-21 | 半導体ペレット用照明装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5844849U JPS5844849U (ja) | 1983-03-25 |
JPS626686Y2 true JPS626686Y2 (enrdf_load_html_response) | 1987-02-16 |
Family
ID=29933477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14031581U Granted JPS5844849U (ja) | 1981-09-21 | 1981-09-21 | 半導体ペレット用照明装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5844849U (enrdf_load_html_response) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1568983A4 (en) * | 2002-12-06 | 2008-06-25 | Inter Action Corp | TEST INSTRUMENT FOR A SOLID BODY IMAGING APPARATUS |
-
1981
- 1981-09-21 JP JP14031581U patent/JPS5844849U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5844849U (ja) | 1983-03-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI761544B (zh) | 雷射加工裝置以及雷射加工方法 | |
CN212844296U (zh) | 一种滤光片的缺陷检测系统 | |
CN1405633A (zh) | 照明装置及应用该照明装置的曝光装置和器件制造方法 | |
CN110068534A (zh) | 检测用精准出光装置和测量仪 | |
CN111872586A (zh) | 晶圆激光切割用的产品吸附装置 | |
JP2002328094A (ja) | Ledリング照明及びそれを備えた画像検査装置 | |
JPS626686Y2 (enrdf_load_html_response) | ||
JP3009659B1 (ja) | 傷検査用光源及び傷検査用光源ユニット | |
JP3102850B2 (ja) | 水晶ブランクの傷検査装置 | |
JPS62153737A (ja) | 物品表面検査装置 | |
JPH1164232A (ja) | 水晶基板用載置台及び水晶基板の傷検査装置 | |
JP2003059329A (ja) | 照明装置 | |
GB2170651A (en) | Method and apparatus for aligning a filter onto a color charge-coupled device imager | |
ITMI981181A1 (it) | Diffusore ottico e dispositivo di illuminazione provvisto dello stesso | |
CN109001228A (zh) | 一种带背光照明的衬底缺陷检测用回转工作台 | |
JP2019100968A (ja) | ステージ表面上の突起物の上面を検査するマクロ検査装置 | |
JPH0566478A (ja) | 反射型スクリーン及びその製造方法 | |
JPH0861928A (ja) | 外観検査用照明装置 | |
CN210136184U (zh) | 一种带背光照明的衬底缺陷检测用回转工作台 | |
JPH0720913Y2 (ja) | 光処理器 | |
US20190215499A1 (en) | Projecting system, small right angle prism mirrors, and method for fabricating small right angle prism mirrors | |
TW200308005A (en) | Microelectronic substrate edge bead processing apparatus and method | |
JPH04326508A (ja) | 真空吸着固定台およびそれを用いた露光装置 | |
JPH06160064A (ja) | 表面の検査方法および検査装置 | |
JPH0714649U (ja) | 真空吸着チャック |