JPS6261256A - イオンビ−ムにおける偏向歪の修正方法とこの方法に使用する偏向歪検出素子 - Google Patents

イオンビ−ムにおける偏向歪の修正方法とこの方法に使用する偏向歪検出素子

Info

Publication number
JPS6261256A
JPS6261256A JP60200651A JP20065185A JPS6261256A JP S6261256 A JPS6261256 A JP S6261256A JP 60200651 A JP60200651 A JP 60200651A JP 20065185 A JP20065185 A JP 20065185A JP S6261256 A JPS6261256 A JP S6261256A
Authority
JP
Japan
Prior art keywords
ion beam
distortion
deflection
deflective
detection element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60200651A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0533496B2 (OSRAM
Inventor
Eizo Miyauchi
宮内　栄三
Toshio Hashimoto
橋本　寿夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP60200651A priority Critical patent/JPS6261256A/ja
Publication of JPS6261256A publication Critical patent/JPS6261256A/ja
Publication of JPH0533496B2 publication Critical patent/JPH0533496B2/ja
Granted legal-status Critical Current

Links

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  • Electron Beam Exposure (AREA)
JP60200651A 1985-09-12 1985-09-12 イオンビ−ムにおける偏向歪の修正方法とこの方法に使用する偏向歪検出素子 Granted JPS6261256A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60200651A JPS6261256A (ja) 1985-09-12 1985-09-12 イオンビ−ムにおける偏向歪の修正方法とこの方法に使用する偏向歪検出素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60200651A JPS6261256A (ja) 1985-09-12 1985-09-12 イオンビ−ムにおける偏向歪の修正方法とこの方法に使用する偏向歪検出素子

Publications (2)

Publication Number Publication Date
JPS6261256A true JPS6261256A (ja) 1987-03-17
JPH0533496B2 JPH0533496B2 (OSRAM) 1993-05-19

Family

ID=16427945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60200651A Granted JPS6261256A (ja) 1985-09-12 1985-09-12 イオンビ−ムにおける偏向歪の修正方法とこの方法に使用する偏向歪検出素子

Country Status (1)

Country Link
JP (1) JPS6261256A (OSRAM)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249340A (ja) * 1987-10-30 1990-02-19 Nano Quest Canada Inc 走査型電子顕微鏡の倍率調節装置
JP2010205447A (ja) * 2009-02-27 2010-09-16 Kobe Steel Ltd イオン源におけるビーム照射電極の被膜除去装置、これを備えたイオン源、及びビーム照射電極の被膜除去用部材

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55112059A (en) * 1979-02-22 1980-08-29 Nec Corp Clock extracting circuit
JPS56112059A (en) * 1980-02-08 1981-09-04 Jeol Ltd Electron beam device
JPS56124234A (en) * 1980-03-05 1981-09-29 Hitachi Ltd Correcting method for electron beam deflection

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55112059A (en) * 1979-02-22 1980-08-29 Nec Corp Clock extracting circuit
JPS56112059A (en) * 1980-02-08 1981-09-04 Jeol Ltd Electron beam device
JPS56124234A (en) * 1980-03-05 1981-09-29 Hitachi Ltd Correcting method for electron beam deflection

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249340A (ja) * 1987-10-30 1990-02-19 Nano Quest Canada Inc 走査型電子顕微鏡の倍率調節装置
JP2010205447A (ja) * 2009-02-27 2010-09-16 Kobe Steel Ltd イオン源におけるビーム照射電極の被膜除去装置、これを備えたイオン源、及びビーム照射電極の被膜除去用部材

Also Published As

Publication number Publication date
JPH0533496B2 (OSRAM) 1993-05-19

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