JPS6259457B2 - - Google Patents

Info

Publication number
JPS6259457B2
JPS6259457B2 JP53128367A JP12836778A JPS6259457B2 JP S6259457 B2 JPS6259457 B2 JP S6259457B2 JP 53128367 A JP53128367 A JP 53128367A JP 12836778 A JP12836778 A JP 12836778A JP S6259457 B2 JPS6259457 B2 JP S6259457B2
Authority
JP
Japan
Prior art keywords
wafer
focus
depth
focal plane
plane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53128367A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5555529A (en
Inventor
Hiroshi Nishizuka
Susumu Komorya
Mitsuhiro Morita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP12836778A priority Critical patent/JPS5555529A/ja
Priority to GB8040960A priority patent/GB2063524B/en
Priority to GB8040959A priority patent/GB2063523B/en
Priority to GB7936237A priority patent/GB2035610B/en
Priority to DE19792942388 priority patent/DE2942388A1/de
Priority to US06/087,387 priority patent/US4298273A/en
Publication of JPS5555529A publication Critical patent/JPS5555529A/ja
Priority to SG40884A priority patent/SG40884G/en
Priority to SG404/84A priority patent/SG40484G/en
Priority to HK356/85A priority patent/HK35685A/xx
Priority to HK361/85A priority patent/HK36185A/xx
Priority to HK684/85A priority patent/HK68485A/xx
Priority to MY663/85A priority patent/MY8500663A/xx
Priority to MY669/85A priority patent/MY8500669A/xx
Priority to MY1985670A priority patent/MY8500670A/xx
Publication of JPS6259457B2 publication Critical patent/JPS6259457B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70716—Stages

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP12836778A 1978-10-20 1978-10-20 Method of positioning wafer Granted JPS5555529A (en)

Priority Applications (14)

Application Number Priority Date Filing Date Title
JP12836778A JPS5555529A (en) 1978-10-20 1978-10-20 Method of positioning wafer
GB8040960A GB2063524B (en) 1978-10-20 1979-10-18 Method of positioning a wafer in a projection aligner
GB8040959A GB2063523B (en) 1978-10-20 1979-10-18 Wafer position setting apparatus
GB7936237A GB2035610B (en) 1978-10-20 1979-10-18 Wafer projection aligner
DE19792942388 DE2942388A1 (de) 1978-10-20 1979-10-19 Halbleiterplaettchen-positioniervorrichtung
US06/087,387 US4298273A (en) 1978-10-20 1979-10-22 Projection aligner and method of positioning a wafer
SG404/84A SG40484G (en) 1978-10-20 1984-06-04 Projection aligner
SG40884A SG40884G (en) 1978-10-20 1984-06-04 A method of positioning a wafer in a projection aligner
HK356/85A HK35685A (en) 1978-10-20 1985-05-09 Projection aligner
HK361/85A HK36185A (en) 1978-10-20 1985-05-09 Wafer position setting apparatus
HK684/85A HK68485A (en) 1978-10-20 1985-09-12 A method of positioning a wafer in a projection aligner
MY663/85A MY8500663A (en) 1978-10-20 1985-12-30 Projection aligner
MY669/85A MY8500669A (en) 1978-10-20 1985-12-30 Water position setting apparatus
MY1985670A MY8500670A (en) 1978-10-20 1985-12-31 A method of positioning a wafer in a protection aligner

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12836778A JPS5555529A (en) 1978-10-20 1978-10-20 Method of positioning wafer

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP59137156A Division JPS6063929A (ja) 1984-07-04 1984-07-04 板状物の光学処理装置

Publications (2)

Publication Number Publication Date
JPS5555529A JPS5555529A (en) 1980-04-23
JPS6259457B2 true JPS6259457B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-12-11

Family

ID=14983062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12836778A Granted JPS5555529A (en) 1978-10-20 1978-10-20 Method of positioning wafer

Country Status (1)

Country Link
JP (1) JPS5555529A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4344160A (en) * 1980-05-02 1982-08-10 The Perkin-Elmer Corporation Automatic wafer focusing and flattening system
JPS5740669A (en) 1980-08-25 1982-03-06 Citizen Watch Co Ltd Watch hand and manuacture thereof
JPS59121932A (ja) * 1982-12-28 1984-07-14 Fujitsu Ltd 自動焦点制御装置
JP2659704B2 (ja) * 1986-02-26 1997-09-30 株式会社東芝 露光装置
CN107344327B (zh) * 2017-05-05 2019-11-22 清华大学 在线改良晶圆表面平坦度的方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4922868A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1972-06-20 1974-02-28
JPS5330878A (en) * 1976-09-03 1978-03-23 Fujitsu Ltd Focus adjusting device in projection type exposure apparatus
JPS5359371A (en) * 1976-11-10 1978-05-29 Hitachi Ltd Mask alignment unit
JPS5381569U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1976-12-09 1978-07-06
JPS5375773A (en) * 1976-12-17 1978-07-05 Fujitsu Ltd Automatic focussing unit

Also Published As

Publication number Publication date
JPS5555529A (en) 1980-04-23

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