JPS5330878A - Focus adjusting device in projection type exposure apparatus - Google Patents
Focus adjusting device in projection type exposure apparatusInfo
- Publication number
- JPS5330878A JPS5330878A JP10503276A JP10503276A JPS5330878A JP S5330878 A JPS5330878 A JP S5330878A JP 10503276 A JP10503276 A JP 10503276A JP 10503276 A JP10503276 A JP 10503276A JP S5330878 A JPS5330878 A JP S5330878A
- Authority
- JP
- Japan
- Prior art keywords
- adjusting device
- exposure apparatus
- projection type
- focus adjusting
- type exposure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Variable Magnification In Projection-Type Copying Machines (AREA)
- Automatic Focus Adjustment (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
PURPOSE: Depending of focussing on naked eyes is obviated and automating of focussing is made possible by providing a half mirror and a luminous intensity measuring part.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10503276A JPS5330878A (en) | 1976-09-03 | 1976-09-03 | Focus adjusting device in projection type exposure apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10503276A JPS5330878A (en) | 1976-09-03 | 1976-09-03 | Focus adjusting device in projection type exposure apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5330878A true JPS5330878A (en) | 1978-03-23 |
Family
ID=14396668
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10503276A Pending JPS5330878A (en) | 1976-09-03 | 1976-09-03 | Focus adjusting device in projection type exposure apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5330878A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5555529A (en) * | 1978-10-20 | 1980-04-23 | Hitachi Ltd | Method of positioning wafer |
| JPS5875834A (en) * | 1981-10-30 | 1983-05-07 | Hitachi Ltd | Mask alignment device |
| JPS59121932A (en) * | 1982-12-28 | 1984-07-14 | Fujitsu Ltd | Automatic focusing control unit |
| JPS59160134A (en) * | 1983-03-04 | 1984-09-10 | Canon Inc | Illuminating optical system |
| JPS6063929A (en) * | 1984-07-04 | 1985-04-12 | Hitachi Ltd | Optical processor for plate object |
| JPS60168112A (en) * | 1984-02-13 | 1985-08-31 | Nippon Kogaku Kk <Nikon> | Focusing device of projecting device |
| JPH02207520A (en) * | 1989-02-07 | 1990-08-17 | Canon Inc | Aligner |
| JPH06112106A (en) * | 1992-09-01 | 1994-04-22 | Internatl Business Mach Corp <Ibm> | Apparatus and method for focusing of object image as well as apparatus for focusing of mask image |
-
1976
- 1976-09-03 JP JP10503276A patent/JPS5330878A/en active Pending
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5555529A (en) * | 1978-10-20 | 1980-04-23 | Hitachi Ltd | Method of positioning wafer |
| JPS6259457B2 (en) * | 1978-10-20 | 1987-12-11 | Hitachi Ltd | |
| JPS5875834A (en) * | 1981-10-30 | 1983-05-07 | Hitachi Ltd | Mask alignment device |
| JPH0311540B2 (en) * | 1981-10-30 | 1991-02-18 | Hitachi Ltd | |
| JPS59121932A (en) * | 1982-12-28 | 1984-07-14 | Fujitsu Ltd | Automatic focusing control unit |
| JPS6355859B2 (en) * | 1982-12-28 | 1988-11-04 | Fujitsu Ltd | |
| JPS59160134A (en) * | 1983-03-04 | 1984-09-10 | Canon Inc | Illuminating optical system |
| JPH0462062B2 (en) * | 1983-03-04 | 1992-10-05 | Canon Kk | |
| JPS60168112A (en) * | 1984-02-13 | 1985-08-31 | Nippon Kogaku Kk <Nikon> | Focusing device of projecting device |
| JPS6063929A (en) * | 1984-07-04 | 1985-04-12 | Hitachi Ltd | Optical processor for plate object |
| JPH02207520A (en) * | 1989-02-07 | 1990-08-17 | Canon Inc | Aligner |
| JPH06112106A (en) * | 1992-09-01 | 1994-04-22 | Internatl Business Mach Corp <Ibm> | Apparatus and method for focusing of object image as well as apparatus for focusing of mask image |
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