JPS5359371A - Mask alignment unit - Google Patents
Mask alignment unitInfo
- Publication number
- JPS5359371A JPS5359371A JP13405176A JP13405176A JPS5359371A JP S5359371 A JPS5359371 A JP S5359371A JP 13405176 A JP13405176 A JP 13405176A JP 13405176 A JP13405176 A JP 13405176A JP S5359371 A JPS5359371 A JP S5359371A
- Authority
- JP
- Japan
- Prior art keywords
- mask alignment
- alignment unit
- mask
- face
- jetting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To perform mask alignment with reducing error components symmetrical to co-ordinate axes by sticking closely the surface of a substrate to the mask face by jetting N2 from the selective position of the reverse face while controlling.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13405176A JPS5359371A (en) | 1976-11-10 | 1976-11-10 | Mask alignment unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13405176A JPS5359371A (en) | 1976-11-10 | 1976-11-10 | Mask alignment unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5359371A true JPS5359371A (en) | 1978-05-29 |
Family
ID=15119210
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13405176A Pending JPS5359371A (en) | 1976-11-10 | 1976-11-10 | Mask alignment unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5359371A (en) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5459266U (en) * | 1977-09-30 | 1979-04-24 | ||
JPS5483832A (en) * | 1977-12-16 | 1979-07-04 | Fujitsu Ltd | Contact exposing device |
JPS5555529A (en) * | 1978-10-20 | 1980-04-23 | Hitachi Ltd | Method of positioning wafer |
JPS55121639A (en) * | 1979-03-14 | 1980-09-18 | Hitachi Ltd | Control method for push force of mask and wafer |
JPS5732629A (en) * | 1980-08-07 | 1982-02-22 | Seiko Epson Corp | Mask aligner |
JPS57109330A (en) * | 1980-12-26 | 1982-07-07 | Hitachi Ltd | Mask aliner |
JPS5884311A (en) * | 1981-11-12 | 1983-05-20 | Seiko Instr & Electronics Ltd | Positioning device of rectangular plate piece |
JPS6063929A (en) * | 1984-07-04 | 1985-04-12 | Hitachi Ltd | Optical processor for plate object |
-
1976
- 1976-11-10 JP JP13405176A patent/JPS5359371A/en active Pending
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5459266U (en) * | 1977-09-30 | 1979-04-24 | ||
JPS5483832A (en) * | 1977-12-16 | 1979-07-04 | Fujitsu Ltd | Contact exposing device |
JPS5555529A (en) * | 1978-10-20 | 1980-04-23 | Hitachi Ltd | Method of positioning wafer |
JPS6259457B2 (en) * | 1978-10-20 | 1987-12-11 | Hitachi Ltd | |
JPS55121639A (en) * | 1979-03-14 | 1980-09-18 | Hitachi Ltd | Control method for push force of mask and wafer |
JPS5732629A (en) * | 1980-08-07 | 1982-02-22 | Seiko Epson Corp | Mask aligner |
JPS57109330A (en) * | 1980-12-26 | 1982-07-07 | Hitachi Ltd | Mask aliner |
JPS5884311A (en) * | 1981-11-12 | 1983-05-20 | Seiko Instr & Electronics Ltd | Positioning device of rectangular plate piece |
JPS6063929A (en) * | 1984-07-04 | 1985-04-12 | Hitachi Ltd | Optical processor for plate object |
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