JPS5359371A - Mask alignment unit - Google Patents

Mask alignment unit

Info

Publication number
JPS5359371A
JPS5359371A JP13405176A JP13405176A JPS5359371A JP S5359371 A JPS5359371 A JP S5359371A JP 13405176 A JP13405176 A JP 13405176A JP 13405176 A JP13405176 A JP 13405176A JP S5359371 A JPS5359371 A JP S5359371A
Authority
JP
Japan
Prior art keywords
mask alignment
alignment unit
mask
face
jetting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13405176A
Other languages
Japanese (ja)
Inventor
Toshiharu Matsuzawa
Hideo Sunami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP13405176A priority Critical patent/JPS5359371A/en
Publication of JPS5359371A publication Critical patent/JPS5359371A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To perform mask alignment with reducing error components symmetrical to co-ordinate axes by sticking closely the surface of a substrate to the mask face by jetting N2 from the selective position of the reverse face while controlling.
COPYRIGHT: (C)1978,JPO&Japio
JP13405176A 1976-11-10 1976-11-10 Mask alignment unit Pending JPS5359371A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13405176A JPS5359371A (en) 1976-11-10 1976-11-10 Mask alignment unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13405176A JPS5359371A (en) 1976-11-10 1976-11-10 Mask alignment unit

Publications (1)

Publication Number Publication Date
JPS5359371A true JPS5359371A (en) 1978-05-29

Family

ID=15119210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13405176A Pending JPS5359371A (en) 1976-11-10 1976-11-10 Mask alignment unit

Country Status (1)

Country Link
JP (1) JPS5359371A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5459266U (en) * 1977-09-30 1979-04-24
JPS5483832A (en) * 1977-12-16 1979-07-04 Fujitsu Ltd Contact exposing device
JPS5555529A (en) * 1978-10-20 1980-04-23 Hitachi Ltd Method of positioning wafer
JPS55121639A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Control method for push force of mask and wafer
JPS5732629A (en) * 1980-08-07 1982-02-22 Seiko Epson Corp Mask aligner
JPS57109330A (en) * 1980-12-26 1982-07-07 Hitachi Ltd Mask aliner
JPS5884311A (en) * 1981-11-12 1983-05-20 Seiko Instr & Electronics Ltd Positioning device of rectangular plate piece
JPS6063929A (en) * 1984-07-04 1985-04-12 Hitachi Ltd Optical processor for plate object

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5459266U (en) * 1977-09-30 1979-04-24
JPS5483832A (en) * 1977-12-16 1979-07-04 Fujitsu Ltd Contact exposing device
JPS5555529A (en) * 1978-10-20 1980-04-23 Hitachi Ltd Method of positioning wafer
JPS6259457B2 (en) * 1978-10-20 1987-12-11 Hitachi Ltd
JPS55121639A (en) * 1979-03-14 1980-09-18 Hitachi Ltd Control method for push force of mask and wafer
JPS5732629A (en) * 1980-08-07 1982-02-22 Seiko Epson Corp Mask aligner
JPS57109330A (en) * 1980-12-26 1982-07-07 Hitachi Ltd Mask aliner
JPS5884311A (en) * 1981-11-12 1983-05-20 Seiko Instr & Electronics Ltd Positioning device of rectangular plate piece
JPS6063929A (en) * 1984-07-04 1985-04-12 Hitachi Ltd Optical processor for plate object

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