JPS6258554B2 - - Google Patents
Info
- Publication number
- JPS6258554B2 JPS6258554B2 JP56011822A JP1182281A JPS6258554B2 JP S6258554 B2 JPS6258554 B2 JP S6258554B2 JP 56011822 A JP56011822 A JP 56011822A JP 1182281 A JP1182281 A JP 1182281A JP S6258554 B2 JPS6258554 B2 JP S6258554B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- oxide superconductor
- superconductor
- josephson
- superconductor layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000002887 superconductor Substances 0.000 claims description 61
- 238000004544 sputter deposition Methods 0.000 claims description 14
- 239000000758 substrate Substances 0.000 claims description 14
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 238000005530 etching Methods 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 229910016063 BaPb Inorganic materials 0.000 claims description 9
- 239000012212 insulator Substances 0.000 claims 1
- 239000000203 mixture Substances 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 238000000137 annealing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56011822A JPS57126185A (en) | 1981-01-28 | 1981-01-28 | Manufacture of josephson element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56011822A JPS57126185A (en) | 1981-01-28 | 1981-01-28 | Manufacture of josephson element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57126185A JPS57126185A (en) | 1982-08-05 |
| JPS6258554B2 true JPS6258554B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-12-07 |
Family
ID=11788465
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56011822A Granted JPS57126185A (en) | 1981-01-28 | 1981-01-28 | Manufacture of josephson element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57126185A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0425641U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1990-06-20 | 1992-02-28 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6430279A (en) * | 1987-07-27 | 1989-02-01 | Matsushita Electric Ind Co Ltd | Superconducting device and manufacture thereof |
| JPH01199453A (ja) * | 1988-02-04 | 1989-08-10 | Fujitsu Ltd | 超伝導体素子の製造方法 |
| JP2976427B2 (ja) * | 1988-09-05 | 1999-11-10 | 松下電器産業株式会社 | ジョセフソン素子の製造方法 |
-
1981
- 1981-01-28 JP JP56011822A patent/JPS57126185A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0425641U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1990-06-20 | 1992-02-28 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57126185A (en) | 1982-08-05 |