JPS6258156B2 - - Google Patents
Info
- Publication number
- JPS6258156B2 JPS6258156B2 JP58078263A JP7826383A JPS6258156B2 JP S6258156 B2 JPS6258156 B2 JP S6258156B2 JP 58078263 A JP58078263 A JP 58078263A JP 7826383 A JP7826383 A JP 7826383A JP S6258156 B2 JPS6258156 B2 JP S6258156B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- josephson
- superconducting
- temperature
- lower electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 8
- 230000004888 barrier function Effects 0.000 claims description 7
- 239000012212 insulator Substances 0.000 claims description 2
- 229910052702 rhenium Inorganic materials 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 229910000691 Re alloy Inorganic materials 0.000 claims 2
- 239000000758 substrate Substances 0.000 description 8
- 229910052758 niobium Inorganic materials 0.000 description 4
- 238000001704 evaporation Methods 0.000 description 3
- 239000000956 alloy Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 229910052745 lead Inorganic materials 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000005382 thermal cycling Methods 0.000 description 2
- 229910052720 vanadium Inorganic materials 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 230000005668 Josephson effect Effects 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000002441 X-ray diffraction Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000006664 bond formation reaction Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/10—Junction-based devices
- H10N60/12—Josephson-effect devices
Landscapes
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58078263A JPS58212186A (ja) | 1983-05-06 | 1983-05-06 | ジヨセフソン接合装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP58078263A JPS58212186A (ja) | 1983-05-06 | 1983-05-06 | ジヨセフソン接合装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58212186A JPS58212186A (ja) | 1983-12-09 |
| JPS6258156B2 true JPS6258156B2 (enrdf_load_stackoverflow) | 1987-12-04 |
Family
ID=13657090
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58078263A Granted JPS58212186A (ja) | 1983-05-06 | 1983-05-06 | ジヨセフソン接合装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58212186A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6113678A (ja) * | 1984-06-29 | 1986-01-21 | Agency Of Ind Science & Technol | ジヨセフソン接合素子の作製方法 |
| NL8800857A (nl) * | 1988-04-05 | 1989-11-01 | Philips Nv | Inrichting en werkwijze voor het vervaardigen van een inrichting. |
-
1983
- 1983-05-06 JP JP58078263A patent/JPS58212186A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58212186A (ja) | 1983-12-09 |
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