JPS6257095B2 - - Google Patents

Info

Publication number
JPS6257095B2
JPS6257095B2 JP55069245A JP6924580A JPS6257095B2 JP S6257095 B2 JPS6257095 B2 JP S6257095B2 JP 55069245 A JP55069245 A JP 55069245A JP 6924580 A JP6924580 A JP 6924580A JP S6257095 B2 JPS6257095 B2 JP S6257095B2
Authority
JP
Japan
Prior art keywords
titanium
film
tungsten
oxide film
tantalum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55069245A
Other languages
English (en)
Japanese (ja)
Other versions
JPS56165345A (en
Inventor
Hirotsugu Harada
Katsuhiro Hirata
Hideo Kotani
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP6924580A priority Critical patent/JPS56165345A/ja
Publication of JPS56165345A publication Critical patent/JPS56165345A/ja
Publication of JPS6257095B2 publication Critical patent/JPS6257095B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W42/00—Arrangements for protection of devices
    • H10W42/20—Arrangements for protection of devices protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons

Landscapes

  • Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP6924580A 1980-05-23 1980-05-23 Semiconductor device Granted JPS56165345A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6924580A JPS56165345A (en) 1980-05-23 1980-05-23 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6924580A JPS56165345A (en) 1980-05-23 1980-05-23 Semiconductor device

Publications (2)

Publication Number Publication Date
JPS56165345A JPS56165345A (en) 1981-12-18
JPS6257095B2 true JPS6257095B2 (cg-RX-API-DMAC7.html) 1987-11-30

Family

ID=13397165

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6924580A Granted JPS56165345A (en) 1980-05-23 1980-05-23 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS56165345A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60246657A (ja) * 1984-05-21 1985-12-06 Mitsubishi Electric Corp α線照射防止用樹脂膜の形成方法
JPS6236847A (ja) * 1985-08-09 1987-02-17 Mitsubishi Electric Corp 樹脂封止半導体装置
JPS62259448A (ja) * 1986-04-14 1987-11-11 Nippon Telegr & Teleph Corp <Ntt> 絶縁膜形成法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4858793A (cg-RX-API-DMAC7.html) * 1971-11-22 1973-08-17
JPS54129888A (en) * 1978-03-30 1979-10-08 Nec Corp Semiconductor unit

Also Published As

Publication number Publication date
JPS56165345A (en) 1981-12-18

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