JPS54129888A - Semiconductor unit - Google Patents
Semiconductor unitInfo
- Publication number
- JPS54129888A JPS54129888A JP3748678A JP3748678A JPS54129888A JP S54129888 A JPS54129888 A JP S54129888A JP 3748678 A JP3748678 A JP 3748678A JP 3748678 A JP3748678 A JP 3748678A JP S54129888 A JPS54129888 A JP S54129888A
- Authority
- JP
- Japan
- Prior art keywords
- film
- layer
- coated
- metal
- insulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make good the bondingness with metal film wiring and to increase the surface hardness, by using the lower layer film consisting of insulation resin as the surface protection film of semiconductor unit, intermediate layer film of metal, and three layer laminating film of the upper of insulation compound of metal.
CONSTITUTION: On the Si substrate 1, SiO2, Si3N4 or those composite film 2 is coated, opening is made on the diffusion region 3 placed on the substrate 1, and the ohmic contact layer 4 such as Pt-Si and Al-Si is coated to here. Further, the Al film 5 at the first layer wiring surrounded with the Al2O3 film 6 extended to the film 2 in contact with the layer 4 is formed, and the intermediate insulation film 7 consisting of SiO2, Si3O4 and polyimide is coated on it. After that, opening is made to a given region of the film 7, Ti film 8, Pt film 9 and Au film 10 of the two layer wiring are provided, and after forming the bump terminal 11, the Al film 12 and Al2O3 film 13 are provided via the insulation resin film, constituting the surface portection film.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3748678A JPS54129888A (en) | 1978-03-30 | 1978-03-30 | Semiconductor unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3748678A JPS54129888A (en) | 1978-03-30 | 1978-03-30 | Semiconductor unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54129888A true JPS54129888A (en) | 1979-10-08 |
Family
ID=12498840
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3748678A Pending JPS54129888A (en) | 1978-03-30 | 1978-03-30 | Semiconductor unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54129888A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56165345A (en) * | 1980-05-23 | 1981-12-18 | Mitsubishi Electric Corp | Semiconductor device |
-
1978
- 1978-03-30 JP JP3748678A patent/JPS54129888A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56165345A (en) * | 1980-05-23 | 1981-12-18 | Mitsubishi Electric Corp | Semiconductor device |
JPS6257095B2 (en) * | 1980-05-23 | 1987-11-30 | Mitsubishi Electric Corp |
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