JPS6257095B2 - - Google Patents
Info
- Publication number
- JPS6257095B2 JPS6257095B2 JP55069245A JP6924580A JPS6257095B2 JP S6257095 B2 JPS6257095 B2 JP S6257095B2 JP 55069245 A JP55069245 A JP 55069245A JP 6924580 A JP6924580 A JP 6924580A JP S6257095 B2 JPS6257095 B2 JP S6257095B2
- Authority
- JP
- Japan
- Prior art keywords
- titanium
- film
- tungsten
- oxide film
- tantalum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Electromagnetism (AREA)
- Toxicology (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
- Formation Of Insulating Films (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6924580A JPS56165345A (en) | 1980-05-23 | 1980-05-23 | Semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6924580A JPS56165345A (en) | 1980-05-23 | 1980-05-23 | Semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56165345A JPS56165345A (en) | 1981-12-18 |
| JPS6257095B2 true JPS6257095B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-11-30 |
Family
ID=13397165
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6924580A Granted JPS56165345A (en) | 1980-05-23 | 1980-05-23 | Semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56165345A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60246657A (ja) * | 1984-05-21 | 1985-12-06 | Mitsubishi Electric Corp | α線照射防止用樹脂膜の形成方法 |
| JPS6236847A (ja) * | 1985-08-09 | 1987-02-17 | Mitsubishi Electric Corp | 樹脂封止半導体装置 |
| JPS62259448A (ja) * | 1986-04-14 | 1987-11-11 | Nippon Telegr & Teleph Corp <Ntt> | 絶縁膜形成法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4858793A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1971-11-22 | 1973-08-17 | ||
| JPS54129888A (en) * | 1978-03-30 | 1979-10-08 | Nec Corp | Semiconductor unit |
-
1980
- 1980-05-23 JP JP6924580A patent/JPS56165345A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56165345A (en) | 1981-12-18 |