JPS6252828B2 - - Google Patents

Info

Publication number
JPS6252828B2
JPS6252828B2 JP55186941A JP18694180A JPS6252828B2 JP S6252828 B2 JPS6252828 B2 JP S6252828B2 JP 55186941 A JP55186941 A JP 55186941A JP 18694180 A JP18694180 A JP 18694180A JP S6252828 B2 JPS6252828 B2 JP S6252828B2
Authority
JP
Japan
Prior art keywords
circuit
coordinate
probe
probes
reference probe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55186941A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57108709A (en
Inventor
Shigeru Soeno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP55186941A priority Critical patent/JPS57108709A/ja
Publication of JPS57108709A publication Critical patent/JPS57108709A/ja
Publication of JPS6252828B2 publication Critical patent/JPS6252828B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Image Processing (AREA)
  • Image Analysis (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Tests Of Electronic Circuits (AREA)
JP55186941A 1980-12-26 1980-12-26 Coordinate tracing system Granted JPS57108709A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55186941A JPS57108709A (en) 1980-12-26 1980-12-26 Coordinate tracing system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55186941A JPS57108709A (en) 1980-12-26 1980-12-26 Coordinate tracing system

Publications (2)

Publication Number Publication Date
JPS57108709A JPS57108709A (en) 1982-07-06
JPS6252828B2 true JPS6252828B2 (enrdf_load_stackoverflow) 1987-11-06

Family

ID=16197394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55186941A Granted JPS57108709A (en) 1980-12-26 1980-12-26 Coordinate tracing system

Country Status (1)

Country Link
JP (1) JPS57108709A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005241491A (ja) * 2004-02-27 2005-09-08 Nidec-Read Corp 基板検査装置、位置調整方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0815840B2 (ja) * 1988-08-04 1996-02-21 重 村越 タフテッド基材マーキング装置
DE102011008421A1 (de) * 2011-01-12 2012-07-12 Carl Zeiss Industrielle Messtechnik Gmbh Verfahren und Anordnung zum Kalibrieren von messwertgebenden Sensoren eines taktilen Koordinatenmessgerätes

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005241491A (ja) * 2004-02-27 2005-09-08 Nidec-Read Corp 基板検査装置、位置調整方法

Also Published As

Publication number Publication date
JPS57108709A (en) 1982-07-06

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