JPS6251648U - - Google Patents
Info
- Publication number
- JPS6251648U JPS6251648U JP14366585U JP14366585U JPS6251648U JP S6251648 U JPS6251648 U JP S6251648U JP 14366585 U JP14366585 U JP 14366585U JP 14366585 U JP14366585 U JP 14366585U JP S6251648 U JPS6251648 U JP S6251648U
- Authority
- JP
- Japan
- Prior art keywords
- ionization chamber
- electrode
- acceleration electrode
- gas
- ion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 150000002500 ions Chemical class 0.000 claims 6
- 230000001133 acceleration Effects 0.000 claims 3
- 238000000605 extraction Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14366585U JPH0145068Y2 (xx) | 1985-09-20 | 1985-09-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14366585U JPH0145068Y2 (xx) | 1985-09-20 | 1985-09-20 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6251648U true JPS6251648U (xx) | 1987-03-31 |
JPH0145068Y2 JPH0145068Y2 (xx) | 1989-12-26 |
Family
ID=31053558
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14366585U Expired JPH0145068Y2 (xx) | 1985-09-20 | 1985-09-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0145068Y2 (xx) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02236933A (ja) * | 1989-03-08 | 1990-09-19 | Japan Atom Energy Res Inst | ビーム照射装置 |
-
1985
- 1985-09-20 JP JP14366585U patent/JPH0145068Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02236933A (ja) * | 1989-03-08 | 1990-09-19 | Japan Atom Energy Res Inst | ビーム照射装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0145068Y2 (xx) | 1989-12-26 |
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