JPS6248293B2 - - Google Patents
Info
- Publication number
- JPS6248293B2 JPS6248293B2 JP9666281A JP9666281A JPS6248293B2 JP S6248293 B2 JPS6248293 B2 JP S6248293B2 JP 9666281 A JP9666281 A JP 9666281A JP 9666281 A JP9666281 A JP 9666281A JP S6248293 B2 JPS6248293 B2 JP S6248293B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- short circuit
- thin film
- circuit detection
- conductive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 25
- 238000005498 polishing Methods 0.000 claims description 23
- 239000010409 thin film Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 229910000889 permalloy Inorganic materials 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000005520 cutting process Methods 0.000 description 2
- 230000001939 inductive effect Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
- G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9666281A JPS57212609A (en) | 1981-06-24 | 1981-06-24 | Manufacture of thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9666281A JPS57212609A (en) | 1981-06-24 | 1981-06-24 | Manufacture of thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57212609A JPS57212609A (en) | 1982-12-27 |
| JPS6248293B2 true JPS6248293B2 (enrdf_load_stackoverflow) | 1987-10-13 |
Family
ID=14171025
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9666281A Granted JPS57212609A (en) | 1981-06-24 | 1981-06-24 | Manufacture of thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57212609A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3513431A1 (de) * | 1985-04-15 | 1986-10-23 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur herstellung mindestens eines magnetkopfes in duennfilmtechnik |
| JP2001053039A (ja) * | 1999-08-05 | 2001-02-23 | Okamoto Machine Tool Works Ltd | ウエハの研磨終点検出方法および研磨終点検出装置 |
-
1981
- 1981-06-24 JP JP9666281A patent/JPS57212609A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57212609A (en) | 1982-12-27 |
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