JPS57212609A - Manufacture of thin film magnetic head - Google Patents
Manufacture of thin film magnetic headInfo
- Publication number
- JPS57212609A JPS57212609A JP9666281A JP9666281A JPS57212609A JP S57212609 A JPS57212609 A JP S57212609A JP 9666281 A JP9666281 A JP 9666281A JP 9666281 A JP9666281 A JP 9666281A JP S57212609 A JPS57212609 A JP S57212609A
- Authority
- JP
- Japan
- Prior art keywords
- short
- circuit
- thin film
- polishing
- magnetic layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005498 polishing Methods 0.000 abstract 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910000889 permalloy Inorganic materials 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 239000004020 conductor Substances 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
- G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9666281A JPS57212609A (en) | 1981-06-24 | 1981-06-24 | Manufacture of thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9666281A JPS57212609A (en) | 1981-06-24 | 1981-06-24 | Manufacture of thin film magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS57212609A true JPS57212609A (en) | 1982-12-27 |
JPS6248293B2 JPS6248293B2 (enrdf_load_stackoverflow) | 1987-10-13 |
Family
ID=14171025
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9666281A Granted JPS57212609A (en) | 1981-06-24 | 1981-06-24 | Manufacture of thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57212609A (enrdf_load_stackoverflow) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4727643A (en) * | 1985-04-15 | 1988-03-01 | Siemens Aktiengesellschaft | Method for manufacturing a magnetic head by a thin-film technique |
US6183656B1 (en) * | 1999-08-05 | 2001-02-06 | Okamoto Machine Tool Works, Ltd. | Method of detecting end point of polishing of wafer and apparatus for detecting end point of polishing |
-
1981
- 1981-06-24 JP JP9666281A patent/JPS57212609A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4727643A (en) * | 1985-04-15 | 1988-03-01 | Siemens Aktiengesellschaft | Method for manufacturing a magnetic head by a thin-film technique |
US6183656B1 (en) * | 1999-08-05 | 2001-02-06 | Okamoto Machine Tool Works, Ltd. | Method of detecting end point of polishing of wafer and apparatus for detecting end point of polishing |
Also Published As
Publication number | Publication date |
---|---|
JPS6248293B2 (enrdf_load_stackoverflow) | 1987-10-13 |
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