JPS6246990A - 光−高周波誘導加熱単結晶製造方法及び装置 - Google Patents
光−高周波誘導加熱単結晶製造方法及び装置Info
- Publication number
- JPS6246990A JPS6246990A JP18799985A JP18799985A JPS6246990A JP S6246990 A JPS6246990 A JP S6246990A JP 18799985 A JP18799985 A JP 18799985A JP 18799985 A JP18799985 A JP 18799985A JP S6246990 A JPS6246990 A JP S6246990A
- Authority
- JP
- Japan
- Prior art keywords
- heated
- raw material
- heating
- single crystal
- frequency induction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013078 crystal Substances 0.000 title claims abstract description 80
- 238000010438 heat treatment Methods 0.000 title claims abstract description 60
- 230000006698 induction Effects 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title description 14
- 239000002994 raw material Substances 0.000 claims abstract description 36
- 230000003287 optical effect Effects 0.000 claims abstract description 16
- 238000004519 manufacturing process Methods 0.000 claims description 13
- 238000002844 melting Methods 0.000 abstract description 21
- 230000008018 melting Effects 0.000 abstract description 20
- 239000000155 melt Substances 0.000 abstract description 3
- 239000011810 insulating material Substances 0.000 abstract description 2
- 230000005855 radiation Effects 0.000 abstract description 2
- 239000000463 material Substances 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 239000012777 electrically insulating material Substances 0.000 description 4
- 229910052736 halogen Inorganic materials 0.000 description 4
- 150000002367 halogens Chemical class 0.000 description 4
- 239000000289 melt material Substances 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 229910002804 graphite Inorganic materials 0.000 description 3
- 239000010439 graphite Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000615 nonconductor Substances 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- YXTPWUNVHCYOSP-UHFFFAOYSA-N bis($l^{2}-silanylidene)molybdenum Chemical compound [Si]=[Mo]=[Si] YXTPWUNVHCYOSP-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 235000018185 Betula X alpestris Nutrition 0.000 description 1
- 235000018212 Betula X uliginosa Nutrition 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010292 electrical insulation Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 229910021344 molybdenum silicide Inorganic materials 0.000 description 1
- 239000011224 oxide ceramic Substances 0.000 description 1
- 229910052574 oxide ceramic Inorganic materials 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18799985A JPS6246990A (ja) | 1985-08-26 | 1985-08-26 | 光−高周波誘導加熱単結晶製造方法及び装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18799985A JPS6246990A (ja) | 1985-08-26 | 1985-08-26 | 光−高周波誘導加熱単結晶製造方法及び装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6246990A true JPS6246990A (ja) | 1987-02-28 |
| JPH0566350B2 JPH0566350B2 (enrdf_load_stackoverflow) | 1993-09-21 |
Family
ID=16215865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18799985A Granted JPS6246990A (ja) | 1985-08-26 | 1985-08-26 | 光−高周波誘導加熱単結晶製造方法及び装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6246990A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5926432B1 (ja) * | 2015-10-01 | 2016-05-25 | 伸 阿久津 | 単結晶製造装置および単結晶製造方法 |
-
1985
- 1985-08-26 JP JP18799985A patent/JPS6246990A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5926432B1 (ja) * | 2015-10-01 | 2016-05-25 | 伸 阿久津 | 単結晶製造装置および単結晶製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0566350B2 (enrdf_load_stackoverflow) | 1993-09-21 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |