JPS6246431Y2 - - Google Patents

Info

Publication number
JPS6246431Y2
JPS6246431Y2 JP15796084U JP15796084U JPS6246431Y2 JP S6246431 Y2 JPS6246431 Y2 JP S6246431Y2 JP 15796084 U JP15796084 U JP 15796084U JP 15796084 U JP15796084 U JP 15796084U JP S6246431 Y2 JPS6246431 Y2 JP S6246431Y2
Authority
JP
Japan
Prior art keywords
chamber
high vacuum
heating source
sample chamber
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15796084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6175831U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15796084U priority Critical patent/JPS6246431Y2/ja
Publication of JPS6175831U publication Critical patent/JPS6175831U/ja
Application granted granted Critical
Publication of JPS6246431Y2 publication Critical patent/JPS6246431Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Furnace Details (AREA)
JP15796084U 1984-10-19 1984-10-19 Expired JPS6246431Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15796084U JPS6246431Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15796084U JPS6246431Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Publications (2)

Publication Number Publication Date
JPS6175831U JPS6175831U (enrdf_load_stackoverflow) 1986-05-22
JPS6246431Y2 true JPS6246431Y2 (enrdf_load_stackoverflow) 1987-12-15

Family

ID=30715947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15796084U Expired JPS6246431Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Country Status (1)

Country Link
JP (1) JPS6246431Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6175831U (enrdf_load_stackoverflow) 1986-05-22

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