JPS6175831U - - Google Patents

Info

Publication number
JPS6175831U
JPS6175831U JP15796084U JP15796084U JPS6175831U JP S6175831 U JPS6175831 U JP S6175831U JP 15796084 U JP15796084 U JP 15796084U JP 15796084 U JP15796084 U JP 15796084U JP S6175831 U JPS6175831 U JP S6175831U
Authority
JP
Japan
Prior art keywords
chamber
heating
high vacuum
sample
source chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15796084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6246431Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15796084U priority Critical patent/JPS6246431Y2/ja
Publication of JPS6175831U publication Critical patent/JPS6175831U/ja
Application granted granted Critical
Publication of JPS6246431Y2 publication Critical patent/JPS6246431Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Furnace Details (AREA)
JP15796084U 1984-10-19 1984-10-19 Expired JPS6246431Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15796084U JPS6246431Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15796084U JPS6246431Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Publications (2)

Publication Number Publication Date
JPS6175831U true JPS6175831U (enrdf_load_stackoverflow) 1986-05-22
JPS6246431Y2 JPS6246431Y2 (enrdf_load_stackoverflow) 1987-12-15

Family

ID=30715947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15796084U Expired JPS6246431Y2 (enrdf_load_stackoverflow) 1984-10-19 1984-10-19

Country Status (1)

Country Link
JP (1) JPS6246431Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6246431Y2 (enrdf_load_stackoverflow) 1987-12-15

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