JPS6245965B2 - - Google Patents

Info

Publication number
JPS6245965B2
JPS6245965B2 JP54106627A JP10662779A JPS6245965B2 JP S6245965 B2 JPS6245965 B2 JP S6245965B2 JP 54106627 A JP54106627 A JP 54106627A JP 10662779 A JP10662779 A JP 10662779A JP S6245965 B2 JPS6245965 B2 JP S6245965B2
Authority
JP
Japan
Prior art keywords
sample
image
infrared light
light
visible light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54106627A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5632116A (en
Inventor
Shusuke Kotake
Takeo Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP10662779A priority Critical patent/JPS5632116A/ja
Publication of JPS5632116A publication Critical patent/JPS5632116A/ja
Publication of JPS6245965B2 publication Critical patent/JPS6245965B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP10662779A 1979-08-23 1979-08-23 Specimen observing device Granted JPS5632116A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10662779A JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10662779A JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Publications (2)

Publication Number Publication Date
JPS5632116A JPS5632116A (en) 1981-04-01
JPS6245965B2 true JPS6245965B2 (enrdf_load_stackoverflow) 1987-09-30

Family

ID=14438339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10662779A Granted JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Country Status (1)

Country Link
JP (1) JPS5632116A (enrdf_load_stackoverflow)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184315A (ja) * 1983-04-02 1984-10-19 Rikagaku Kenkyusho 標本の状態検出方法とそのためのレ−ザ−顕微鏡
JPS6050935A (ja) * 1983-08-31 1985-03-22 Agency Of Ind Science & Technol ガリウム砒素ウェーハ検査装置
JPH0697303B2 (ja) * 1986-04-04 1994-11-30 理化学研究所 生細胞レーザ穿孔装置の時分割光学調整方法
JPH0671038B2 (ja) * 1987-03-31 1994-09-07 株式会社東芝 結晶欠陥認識処理方法
US5198927A (en) * 1989-09-20 1993-03-30 Yale University Adapter for microscope
JPH04368146A (ja) * 1991-06-14 1992-12-21 Ratotsuku Syst Eng Kk ウェハ表面の検査装置
KR100272329B1 (ko) * 1994-12-07 2000-11-15 이중구 비디오 마이크로스코프
US5920425A (en) * 1995-09-22 1999-07-06 Samsung Aerospace Industries, Ltd. Internal lighting device for a video microscope system
JP3699761B2 (ja) * 1995-12-26 2005-09-28 オリンパス株式会社 落射蛍光顕微鏡
FR2959305B1 (fr) * 2010-04-26 2014-09-05 Nanotec Solution Dispositif optique et procede d'inspection d'objets structures.
JP2023102366A (ja) * 2022-01-12 2023-07-25 東京エレクトロン株式会社 基板検査装置、基板検査方法、及び、基板検査プログラム

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532936Y1 (enrdf_load_stackoverflow) * 1967-03-31 1970-12-15

Also Published As

Publication number Publication date
JPS5632116A (en) 1981-04-01

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