JPS5632116A - Specimen observing device - Google Patents

Specimen observing device

Info

Publication number
JPS5632116A
JPS5632116A JP10662779A JP10662779A JPS5632116A JP S5632116 A JPS5632116 A JP S5632116A JP 10662779 A JP10662779 A JP 10662779A JP 10662779 A JP10662779 A JP 10662779A JP S5632116 A JPS5632116 A JP S5632116A
Authority
JP
Japan
Prior art keywords
specimen
image
light
vidicon
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10662779A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6245965B2 (enrdf_load_stackoverflow
Inventor
Shusuke Kotake
Takeo Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10662779A priority Critical patent/JPS5632116A/ja
Publication of JPS5632116A publication Critical patent/JPS5632116A/ja
Publication of JPS6245965B2 publication Critical patent/JPS6245965B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP10662779A 1979-08-23 1979-08-23 Specimen observing device Granted JPS5632116A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10662779A JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10662779A JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Publications (2)

Publication Number Publication Date
JPS5632116A true JPS5632116A (en) 1981-04-01
JPS6245965B2 JPS6245965B2 (enrdf_load_stackoverflow) 1987-09-30

Family

ID=14438339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10662779A Granted JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Country Status (1)

Country Link
JP (1) JPS5632116A (enrdf_load_stackoverflow)

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184315A (ja) * 1983-04-02 1984-10-19 Rikagaku Kenkyusho 標本の状態検出方法とそのためのレ−ザ−顕微鏡
JPS6050935A (ja) * 1983-08-31 1985-03-22 Agency Of Ind Science & Technol ガリウム砒素ウェーハ検査装置
JPS62234113A (ja) * 1986-04-04 1987-10-14 Rikagaku Kenkyusho 生細胞レーザ穿孔装置の時分割光学調整方法
JPS63244753A (ja) * 1987-03-31 1988-10-12 Toshiba Corp 結晶欠陥認識処理方法
JPH04368146A (ja) * 1991-06-14 1992-12-21 Ratotsuku Syst Eng Kk ウェハ表面の検査装置
US5198927A (en) * 1989-09-20 1993-03-30 Yale University Adapter for microscope
US5691840A (en) * 1994-12-07 1997-11-25 Samsung Aerospace Industries, Ltd. Video microscope
US5920425A (en) * 1995-09-22 1999-07-06 Samsung Aerospace Industries, Ltd. Internal lighting device for a video microscope system
US6025956A (en) * 1995-12-26 2000-02-15 Olympus Optical Co., Ltd. Incident-light fluorescence microscope
JP2017096956A (ja) * 2010-04-26 2017-06-01 ナノテック ソリュシオンＮａｎｏｔｅｃ Ｓｏｌｕｔｉｏｎ 構造物体を検査するための光学装置及び方法
JP2023102366A (ja) * 2022-01-12 2023-07-25 東京エレクトロン株式会社 基板検査装置、基板検査方法、及び、基板検査プログラム
US12413832B2 (en) 2022-01-12 2025-09-09 Tokyo Electron Limited Substrate inspection apparatus, substrate inspection method, and recording medium

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532936Y1 (enrdf_load_stackoverflow) * 1967-03-31 1970-12-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532936Y1 (enrdf_load_stackoverflow) * 1967-03-31 1970-12-15

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184315A (ja) * 1983-04-02 1984-10-19 Rikagaku Kenkyusho 標本の状態検出方法とそのためのレ−ザ−顕微鏡
JPS6050935A (ja) * 1983-08-31 1985-03-22 Agency Of Ind Science & Technol ガリウム砒素ウェーハ検査装置
JPS62234113A (ja) * 1986-04-04 1987-10-14 Rikagaku Kenkyusho 生細胞レーザ穿孔装置の時分割光学調整方法
JPS63244753A (ja) * 1987-03-31 1988-10-12 Toshiba Corp 結晶欠陥認識処理方法
US5349468A (en) * 1989-09-20 1994-09-20 Yale University Adapter for microscope
US5198927A (en) * 1989-09-20 1993-03-30 Yale University Adapter for microscope
JPH04368146A (ja) * 1991-06-14 1992-12-21 Ratotsuku Syst Eng Kk ウェハ表面の検査装置
US5691840A (en) * 1994-12-07 1997-11-25 Samsung Aerospace Industries, Ltd. Video microscope
US5920425A (en) * 1995-09-22 1999-07-06 Samsung Aerospace Industries, Ltd. Internal lighting device for a video microscope system
US6025956A (en) * 1995-12-26 2000-02-15 Olympus Optical Co., Ltd. Incident-light fluorescence microscope
JP2017096956A (ja) * 2010-04-26 2017-06-01 ナノテック ソリュシオンＮａｎｏｔｅｃ Ｓｏｌｕｔｉｏｎ 構造物体を検査するための光学装置及び方法
JP2023102366A (ja) * 2022-01-12 2023-07-25 東京エレクトロン株式会社 基板検査装置、基板検査方法、及び、基板検査プログラム
US12413832B2 (en) 2022-01-12 2025-09-09 Tokyo Electron Limited Substrate inspection apparatus, substrate inspection method, and recording medium

Also Published As

Publication number Publication date
JPS6245965B2 (enrdf_load_stackoverflow) 1987-09-30

Similar Documents

Publication Publication Date Title
US4515445A (en) Optical system for transmitted-light microscopy with incident illumination
KR0124058B1 (en) Measuring device and method of 2-dimension microscope displacement by using moire appearance
GB1318301A (en) Variable phase-contrast and interference microscope
JPS5632116A (en) Specimen observing device
GB1089078A (en) Coaxial illuminator for stereomicroscope
JPS55144566A (en) Optical fiber device for light wave range finder
JPS56142509A (en) Lighting device of microscope
JPS55113014A (en) Coaxial reflected lighting type stereomicroscope
JPS55111929A (en) Automatic focusing device
US3806257A (en) Operator viewing optics for a slide classification system
US2074106A (en) Metallographic illuminating system and prism therefor
GB719700A (en) Method of and apparatus for testing lenses
JPS5467443A (en) Observer
JPS55111928A (en) Automatic focusing device
JPS5518664A (en) Information mark display device
JPS57197511A (en) Focusing device for binocular stereoscopic microscope
JPS5466854A (en) Polarized lighting system of binocular stereo microscope
JPS55164304A (en) Mirror surface check unit
Taylor The control of amplitude in phase-contrast microscopy
GB1454675A (en) Optical system for objective refractor for the eye
JPS57148233A (en) Testing method and device for hardness
JPS54106253A (en) Automatic focusing device
GB570022A (en) A projection system for the inspection of internal surfaces
JPS55140102A (en) Measuring device for flatness of inspected plane glass
JPS5546729A (en) Finder optical system