JPS5632116A - Specimen observing device - Google Patents

Specimen observing device

Info

Publication number
JPS5632116A
JPS5632116A JP10662779A JP10662779A JPS5632116A JP S5632116 A JPS5632116 A JP S5632116A JP 10662779 A JP10662779 A JP 10662779A JP 10662779 A JP10662779 A JP 10662779A JP S5632116 A JPS5632116 A JP S5632116A
Authority
JP
Japan
Prior art keywords
specimen
image
light
vidicon
rays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10662779A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6245965B2 (enrdf_load_stackoverflow
Inventor
Shusuke Kotake
Takeo Sugawara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP10662779A priority Critical patent/JPS5632116A/ja
Publication of JPS5632116A publication Critical patent/JPS5632116A/ja
Publication of JPS6245965B2 publication Critical patent/JPS6245965B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Microscoopes, Condenser (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10662779A 1979-08-23 1979-08-23 Specimen observing device Granted JPS5632116A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10662779A JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10662779A JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Publications (2)

Publication Number Publication Date
JPS5632116A true JPS5632116A (en) 1981-04-01
JPS6245965B2 JPS6245965B2 (enrdf_load_stackoverflow) 1987-09-30

Family

ID=14438339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10662779A Granted JPS5632116A (en) 1979-08-23 1979-08-23 Specimen observing device

Country Status (1)

Country Link
JP (1) JPS5632116A (enrdf_load_stackoverflow)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184315A (ja) * 1983-04-02 1984-10-19 Rikagaku Kenkyusho 標本の状態検出方法とそのためのレ−ザ−顕微鏡
JPS6050935A (ja) * 1983-08-31 1985-03-22 Agency Of Ind Science & Technol ガリウム砒素ウェーハ検査装置
JPS62234113A (ja) * 1986-04-04 1987-10-14 Rikagaku Kenkyusho 生細胞レーザ穿孔装置の時分割光学調整方法
JPS63244753A (ja) * 1987-03-31 1988-10-12 Toshiba Corp 結晶欠陥認識処理方法
JPH04368146A (ja) * 1991-06-14 1992-12-21 Ratotsuku Syst Eng Kk ウェハ表面の検査装置
US5198927A (en) * 1989-09-20 1993-03-30 Yale University Adapter for microscope
US5691840A (en) * 1994-12-07 1997-11-25 Samsung Aerospace Industries, Ltd. Video microscope
US5920425A (en) * 1995-09-22 1999-07-06 Samsung Aerospace Industries, Ltd. Internal lighting device for a video microscope system
US6025956A (en) * 1995-12-26 2000-02-15 Olympus Optical Co., Ltd. Incident-light fluorescence microscope
JP2017096956A (ja) * 2010-04-26 2017-06-01 ナノテック ソリュシオンＮａｎｏｔｅｃ Ｓｏｌｕｔｉｏｎ 構造物体を検査するための光学装置及び方法
JP2023102366A (ja) * 2022-01-12 2023-07-25 東京エレクトロン株式会社 基板検査装置、基板検査方法、及び、基板検査プログラム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532936Y1 (enrdf_load_stackoverflow) * 1967-03-31 1970-12-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4532936Y1 (enrdf_load_stackoverflow) * 1967-03-31 1970-12-15

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59184315A (ja) * 1983-04-02 1984-10-19 Rikagaku Kenkyusho 標本の状態検出方法とそのためのレ−ザ−顕微鏡
JPS6050935A (ja) * 1983-08-31 1985-03-22 Agency Of Ind Science & Technol ガリウム砒素ウェーハ検査装置
JPS62234113A (ja) * 1986-04-04 1987-10-14 Rikagaku Kenkyusho 生細胞レーザ穿孔装置の時分割光学調整方法
JPS63244753A (ja) * 1987-03-31 1988-10-12 Toshiba Corp 結晶欠陥認識処理方法
US5349468A (en) * 1989-09-20 1994-09-20 Yale University Adapter for microscope
US5198927A (en) * 1989-09-20 1993-03-30 Yale University Adapter for microscope
JPH04368146A (ja) * 1991-06-14 1992-12-21 Ratotsuku Syst Eng Kk ウェハ表面の検査装置
US5691840A (en) * 1994-12-07 1997-11-25 Samsung Aerospace Industries, Ltd. Video microscope
US5920425A (en) * 1995-09-22 1999-07-06 Samsung Aerospace Industries, Ltd. Internal lighting device for a video microscope system
US6025956A (en) * 1995-12-26 2000-02-15 Olympus Optical Co., Ltd. Incident-light fluorescence microscope
JP2017096956A (ja) * 2010-04-26 2017-06-01 ナノテック ソリュシオンＮａｎｏｔｅｃ Ｓｏｌｕｔｉｏｎ 構造物体を検査するための光学装置及び方法
JP2023102366A (ja) * 2022-01-12 2023-07-25 東京エレクトロン株式会社 基板検査装置、基板検査方法、及び、基板検査プログラム
US12413832B2 (en) 2022-01-12 2025-09-09 Tokyo Electron Limited Substrate inspection apparatus, substrate inspection method, and recording medium

Also Published As

Publication number Publication date
JPS6245965B2 (enrdf_load_stackoverflow) 1987-09-30

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