JPS6245690B2 - - Google Patents

Info

Publication number
JPS6245690B2
JPS6245690B2 JP60173263A JP17326385A JPS6245690B2 JP S6245690 B2 JPS6245690 B2 JP S6245690B2 JP 60173263 A JP60173263 A JP 60173263A JP 17326385 A JP17326385 A JP 17326385A JP S6245690 B2 JPS6245690 B2 JP S6245690B2
Authority
JP
Japan
Prior art keywords
furnace
vapor phase
gas
phase growth
upper chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60173263A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61111521A (ja
Inventor
Takatoshi Nakanishi
Tokuji Tanaka
Takashi Udagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP60173263A priority Critical patent/JPS61111521A/ja
Publication of JPS61111521A publication Critical patent/JPS61111521A/ja
Publication of JPS6245690B2 publication Critical patent/JPS6245690B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P14/2911—
    • H10P14/24—
    • H10P14/3421—

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP60173263A 1985-08-08 1985-08-08 縦型気相成長装置 Granted JPS61111521A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60173263A JPS61111521A (ja) 1985-08-08 1985-08-08 縦型気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60173263A JPS61111521A (ja) 1985-08-08 1985-08-08 縦型気相成長装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP7504979A Division JPS55167041A (en) 1978-07-31 1979-06-14 Vertical type gaseous phase growth device

Publications (2)

Publication Number Publication Date
JPS61111521A JPS61111521A (ja) 1986-05-29
JPS6245690B2 true JPS6245690B2 (cg-RX-API-DMAC10.html) 1987-09-28

Family

ID=15957203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60173263A Granted JPS61111521A (ja) 1985-08-08 1985-08-08 縦型気相成長装置

Country Status (1)

Country Link
JP (1) JPS61111521A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1167675A (ja) * 1997-08-21 1999-03-09 Toshiba Ceramics Co Ltd 高速回転気相薄膜形成装置及びそれを用いる高速回転気相薄膜形成方法

Also Published As

Publication number Publication date
JPS61111521A (ja) 1986-05-29

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