JPS6245664B2 - - Google Patents
Info
- Publication number
- JPS6245664B2 JPS6245664B2 JP52056062A JP5606277A JPS6245664B2 JP S6245664 B2 JPS6245664 B2 JP S6245664B2 JP 52056062 A JP52056062 A JP 52056062A JP 5606277 A JP5606277 A JP 5606277A JP S6245664 B2 JPS6245664 B2 JP S6245664B2
- Authority
- JP
- Japan
- Prior art keywords
- ions
- gas
- orifice
- vacuum chamber
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 150000002500 ions Chemical class 0.000 claims description 145
- 230000005684 electric field Effects 0.000 claims description 42
- 238000000034 method Methods 0.000 claims description 14
- 238000001816 cooling Methods 0.000 claims description 7
- 238000012546 transfer Methods 0.000 claims description 2
- 230000005686 electrostatic field Effects 0.000 claims 1
- 239000007789 gas Substances 0.000 description 93
- 238000006243 chemical reaction Methods 0.000 description 12
- 238000013467 fragmentation Methods 0.000 description 8
- 238000006062 fragmentation reaction Methods 0.000 description 8
- 230000035939 shock Effects 0.000 description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 6
- 238000005086 pumping Methods 0.000 description 6
- 238000001228 spectrum Methods 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 239000000376 reactant Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000012159 carrier gas Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 4
- 230000007704 transition Effects 0.000 description 4
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 3
- YMWUJEATGCHHMB-UHFFFAOYSA-N Dichloromethane Chemical compound ClCCl YMWUJEATGCHHMB-UHFFFAOYSA-N 0.000 description 3
- 230000009471 action Effects 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 230000004907 flux Effects 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000010884 ion-beam technique Methods 0.000 description 3
- 238000004949 mass spectrometry Methods 0.000 description 3
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- YZCKVEUIGOORGS-NJFSPNSNSA-N Tritium Chemical compound [3H] YZCKVEUIGOORGS-NJFSPNSNSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012530 fluid Substances 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000001360 synchronised effect Effects 0.000 description 2
- 229910052722 tritium Inorganic materials 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 108010083687 Ion Pumps Proteins 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 238000000065 atmospheric pressure chemical ionisation Methods 0.000 description 1
- 238000005345 coagulation Methods 0.000 description 1
- 230000015271 coagulation Effects 0.000 description 1
- 239000000110 cooling liquid Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000004090 dissolution Methods 0.000 description 1
- KEUKAQNPUBYCIC-UHFFFAOYSA-N ethaneperoxoic acid;hydrogen peroxide Chemical compound OO.CC(=O)OO KEUKAQNPUBYCIC-UHFFFAOYSA-N 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000005596 ionic collisions Effects 0.000 description 1
- 239000001282 iso-butane Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000001819 mass spectrum Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000011002 quantification Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000010183 spectrum analysis Methods 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000000087 stabilizing effect Effects 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 230000004304 visual acuity Effects 0.000 description 1
Landscapes
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5606277A JPS53142294A (en) | 1977-05-17 | 1977-05-17 | Method and apparatus for focusing ions |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5606277A JPS53142294A (en) | 1977-05-17 | 1977-05-17 | Method and apparatus for focusing ions |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53142294A JPS53142294A (en) | 1978-12-11 |
| JPS6245664B2 true JPS6245664B2 (cs) | 1987-09-28 |
Family
ID=13016585
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5606277A Granted JPS53142294A (en) | 1977-05-17 | 1977-05-17 | Method and apparatus for focusing ions |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53142294A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0281379U (cs) * | 1988-12-14 | 1990-06-22 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07118295B2 (ja) * | 1985-10-30 | 1995-12-18 | 株式会社日立製作所 | 質量分析計 |
| JP2002042721A (ja) * | 2000-07-19 | 2002-02-08 | Anelva Corp | イオン付着質量分析装置 |
| JP2010153278A (ja) * | 2008-12-26 | 2010-07-08 | Hitachi High-Technologies Corp | 荷電粒子線加工装置 |
| JP6126111B2 (ja) * | 2011-11-21 | 2017-05-10 | ディーエイチ テクノロジーズ デベロップメント プライベート リミテッド | 質量分析計においてカーテンガス流動を適用するためのシステムおよび方法 |
| WO2019167026A1 (en) * | 2018-03-02 | 2019-09-06 | Dh Technologies Development Pte. Ltd. | Integrated low cost curtain plate, orifice pcb and ion lens assembly |
-
1977
- 1977-05-17 JP JP5606277A patent/JPS53142294A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0281379U (cs) * | 1988-12-14 | 1990-06-22 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS53142294A (en) | 1978-12-11 |
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